Patents by Inventor Christopher M. Devany

Christopher M. Devany has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for forming semiconductor device using beveled clamp fingers in an etching system
    Patent number: 6008134
    Abstract: Beveled clamp fingers (48) are used in an etching system. The beveled top surfaces (40) of the clamp fingers allow etching species to attack more readily the layer being etched at locations near the beveled clamp fingers (48), thereby reducing the size of halo regions (622). In other embodiments, triangular clamp fingers (78) or clamp fingers (88) with rounded top surfaces can be used.
    Type: Grant
    Filed: February 5, 1997
    Date of Patent: December 28, 1999
    Assignee: Motorola, Inc.
    Inventors: Gregory S. Ferguson, Christopher M. Devany