Abstract: A mirror assembly (32) for directing a beam (28) includes a base (450), and an optical element (454) that includes (i) a mirror (460), (ii) a stage (462) that retains the mirror (460), (iii) a mover assembly (464) that moves the stage (462) and the mirror (460) relative to the base (450), and (v) a thermally conductive medium (466) that is positioned between the stage (462) and the base (450) to transfer heat between the stage (462) and the base (450). The thermally conductive medium (466) has a thermal conductivity that is greater than the thermal conductivity of air. The thermally conductive medium (466) can include an ionic fluid or a liquid metal.

Abstract: A mirror assembly (32) for directing a beam (28) includes a base (450), and an optical element (454) that includes (i) a mirror (460), (ii) a stage (462) that retains the mirror (460), (iii) a mover assembly (464) that moves the stage (462) and the mirror (460) relative to the base (450), and (v) a thermally conductive medium (466) that is positioned between the stage (462) and the base (450) to transfer heat between the stage (462) and the base (450). The thermally conductive medium (466) has a thermal conductivity that is greater than the thermal conductivity of air. The thermally conductive medium (466) can include an ionic fluid or a liquid metal.

Abstract: A substrate stage is provided with an immersion liquid collection member that surrounds at least an alignment feature of the substrate stage used to align the substrate on the stage by engaging alignment structure of the substrate. The collection member is located at least partly below the periphery of the substrate held by the substrate holding member of the substrate stage. The collection member has an uppermost liquid-receiving surface that preferably is spaced below a lowermost surface of the substrate when the substrate is held by the substrate holding member. The collection member collects liquid that flows along the alignment feature so as to prevent that immersion liquid from flowing along the under-surface of the substrate.

Abstract: A mirror assembly (32) for directing a beam (28) includes a base (450), and an optical element (454) that includes (i) a mirror (460), (ii) a stage (462) that retains the mirror (460), (iii) a mover assembly (464) that moves the stage (462) and the mirror (460) relative to the base (450), and (v) a thermally conductive medium (466) that is positioned between the stage (462) and the base (450) to transfer heat between the stage (462) and the base (450). The thermally conductive medium (466) has a thermal conductivity that is greater than the thermal conductivity of air. The thermally conductive medium (466) can include an ionic fluid or a liquid metal.

Abstract: A precision assembly (10) for fabricating a substrate (42) includes a precision fabrication apparatus (12), a pedestal assembly (14) and a suspension system (16). The precision fabrication apparatus (12) fabricates the substrate (42). The pedestal assembly (14) supports at least a portion of the fabrication apparatus (12). The suspension system (16) inhibits the transfer of motion between the mounting base (20) and the pedestal assembly (14). The suspension system (16) can include (i) a first boom (380) that is coupled to the mounting base (20) and the pedestal assembly (14), the first boom (380) being pivotable coupled to at least one of the mounting base (20) and the pedestal assembly (14), and (ii) a first resilient assembly (382) that is coupled between the mounting base (20) and at least one of the first boom (380) and the pedestal assembly (14). The first resilient assembly (382) can function similar to a zero length spring over an operational range of the resilient assembly (382).

Abstract: A precision assembly (10) for fabricating a substrate (42) includes a precision fabrication apparatus (12), a pedestal assembly (14) and a suspension system (16). The precision fabrication apparatus (12) fabricates the substrate (42). The pedestal assembly (14) supports at least a portion of the fabrication apparatus (12). The suspension system (16) inhibits the transfer of motion between the mounting base (20) and the pedestal assembly (14). The suspension system (16) can include (i) a first boom (380) that is coupled to the mounting base (20) and the pedestal assembly (14), the first boom (380) being pivotable coupled to at least one of the mounting base (20) and the pedestal assembly (14), and (ii) a first resilient assembly (382) that is coupled between the mounting base (20) and at least one of the first boom (380) and the pedestal assembly (14). The first resilient assembly (382) can function similar to a zero length spring over an operational range of the resilient assembly (382).

Abstract: Forces are minimized in an object supported relative to a surface by providing a first, preferably static force sufficient to retain the object is position when at rest, preferably through a clamping arrangement having a first actuator, measuring or predicting an acceleration and applying a second, preferably dynamic force corresponding to the acceleration. The first and second forces are preferably arranged to be additive or reinforcing but the arrangement can be made fail-safe at the expense of increased power consumption by arranging the first force in accordance with the maximum anticipated acceleration and counteracting the first force with the second force for lesser or zero accelerations. The second force is preferably provided by a clamp of arbitrary configuration which can be moved into and out of engagement with the object. By minimizing forces applied to the object in such a manner, damage such as creep and propagation of crystal lattice dislocations over time can largely be prevented.

Abstract: A force actuator with clamp in one combined unit that can maintain a specified position without requiring a continuous power supply. Power is only required at times when the position of the shaft of the actuator needs to be changed. As each unit holds position without any external effort, a single controller can operate a plurality of these actuators. Clamping action is arranged coaxially to the force actuator, allowing for a more compact unit such that more of these units can be located in a small space to make fine adjustments.

Abstract: Forces are minimized in an object supported relative to a surface by providing a first, preferably static force sufficient to retain the object is position when at rest, preferably through a clamping arrangement having a first actuator, measuring or predicting an acceleration and applying a second, preferably dynamic force corresponding to the acceleration. The first and second forces are preferably arranged to be additive or reinforcing but the arrangement can be made fail-safe at the expense of increased power consumption by arranging the first force in accordance with the maximum anticipated acceleration and counteracting the first force with the second force for lesser or zero accelerations. The second force is preferably provided by a clamp of arbitrary configuration which can be moved into and out of engagement with the object. By minimizing forces applied to the object in such a manner, damage such as creep and propagation of crystal lattice dislocations over time can largely be prevented.