Patents by Inventor Christopher Mark Bowles

Christopher Mark Bowles has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for unpatterned resist etch back of shallow trench isolation refill insulator
    Publication number: 20020072237
    Abstract: A method for forming shallow trench isolation structures is provided that includes forming a plurality of isolation trenches (32) in a substrate (10) where the isolation trenches (32) separate active areas (18). An insulation layer (44) is formed outwardly from the substrate (10) with the insulation layer (44) filling the isolation trenches (32) and covering the active areas (18). A planarization layer (46) is formed outwardly from the insulation layer (44). The planarization layer (46) and the insulation layer (44) are removed together at a substantially even rate down to a polish stop (14) outward from the active areas (18).
    Type: Application
    Filed: December 7, 2000
    Publication date: June 13, 2002
    Inventors: Christopher Mark Bowles, Stanton Petree Ashburn, Gregory Boyd Shinn, Daniel S. Criswell