Patents by Inventor Christopher Michael MAHER

Christopher Michael MAHER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Contour-based array inspection of patterned defects
    Patent number: 9483819
    Abstract: One embodiment relates to a method of inspecting an array of cells on a substrate. A reference image is generated using a cell image that was previously determined to be defect free. A reference contour image which includes contours of the reference image is also generated. The reference contour image is used to detect defects in the array of cells on the substrate. Another embodiment relates to a system for detecting defects in an array on a substrate. Other embodiments, aspects and features are also disclosed.
    Type: Grant
    Filed: October 24, 2013
    Date of Patent: November 1, 2016
    Assignee: KLA-Tencor Corporation
    Inventors: Chien-Huei Chen, Ajay Gupta, Thanh Huy Ha, Jianwei Wang, Hedong Yang, Christopher Michael Maher, Michael J. Van Riet
  • CONTOUR-BASED ARRAY INSPECTION OF PATTERNED DEFECTS
    Publication number: 20140212024
    Abstract: One embodiment relates to a method of inspecting an array of cells on a substrate. A reference image is generated using a cell image that was previously determined to be defect free. A reference contour image which includes contours of the reference image is also generated. The reference contour image is used to detect defects in the array of cells on the substrate. Another embodiment relates to a system for detecting defects in an array on a substrate. Other embodiments, aspects and features are also disclosed.
    Type: Application
    Filed: October 24, 2013
    Publication date: July 31, 2014
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Chien-Huei CHEN, Ajay GUPTA, Thanh Huy HA, Jianwei WANG, Hedong YANG, Christopher Michael MAHER, Michael J. VAN RIET