Patents by Inventor Christopher Murray BEARD

Christopher Murray BEARD has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTODEFINABLE ORGANIC POLYMER SPACER LAYERS
    Publication number: 20230127477
    Abstract: In an example, a method includes depositing an organic polymer layer on one or more material layers. The method also includes thermally curing the organic polymer layer. The method includes depositing a hard mask on the organic polymer layer and depositing a photoresist layer on the hard mask. The method also includes patterning the photoresist layer to expose at least a portion of the hard mask. The method includes etching the exposed portion of the hard mask to expose at least a portion of the organic polymer layer. The method also includes etching the exposed portion of the organic polymer layer to expose at least a portion of the one or more material layers.
    Type: Application
    Filed: April 25, 2022
    Publication date: April 27, 2023
    Inventors: Christopher Murray BEARD, Song ZHENG, John Wesley HAMLIN, III, Win-Jae Jessie YUAN, Kelly Jay TAYLOR, Jose Antonio MARTINEZ SOTO
  • SYSTEM AND METHOD FOR ARRAY OF MEMS ELEMENTS
    Publication number: 20230077129
    Abstract: In an example, a method of manufacturing a MEMS device includes forming a via. The method also includes depositing metal in the via and depositing a first layer of a non-photoactive organic polymer on the metal. The method includes baking the first layer of the non-photoactive organic polymer. The method also includes depositing a second layer of the non-photoactive organic polymer on the first layer of the non-photoactive organic polymer after baking the first layer of the non-photoactive organic polymer. The method includes baking the second layer of the non-photoactive organic polymer. The method also includes etching the first layer and the second layer of the non-photoactive organic polymer.
    Type: Application
    Filed: June 17, 2022
    Publication date: March 9, 2023
    Inventors: Sean Christopher O'BRIEN, Kelly Jay TAYLOR, John Wesley HAMLIN, III, Christopher Murray BEARD