Patents by Inventor Christopher N. Grant

Christopher N. Grant has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10217657
    Abstract: An active substrate alignment system for an ion implanter, the system including a platen, a registration device adapted to selectively move a substrate engagement surface disposed adjacent the platen for limiting movement of a substrate disposed on the platen, a camera configured to capture an image of the substrate before the substrate is disposed on the platen, and a controller in communication with the camera and the registration device, the controller configured to command the registration device to move the substrate engagement surface based on the image to limit movement of the substrate in a predetermined manner.
    Type: Grant
    Filed: September 4, 2015
    Date of Patent: February 26, 2019
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Aaron P. Webb, Timothy J. Miller, Tammy Jo Pride, Christopher N. Grant, James D. Strassner, Charles T. Carlson
  • Publication number: 20170294330
    Abstract: An active substrate alignment system for an ion implanter, the system including a platen, a registration device adapted to selectively move a substrate engagement surface disposed adjacent the platen for limiting movement of a substrate disposed on the platen, a camera configured to capture an image of the substrate before the substrate is disposed on the platen, and a controller in communication with the camera and the registration device, the controller configured to command the registration device to move the substrate engagement surface based on the image to limit movement of the substrate in a predetermined manner.
    Type: Application
    Filed: September 4, 2015
    Publication date: October 12, 2017
    Inventors: Aaron P. Webb, Timothy J. Miller, Tammy Jo Pride, Christopher N. Grant, James D. Strassner, Charles T. Carlson
  • Patent number: 9570309
    Abstract: A mask alignment system for providing precise and repeatable alignment between ion implantation masks and workpieces. The system includes a mask frame having a plurality of ion implantation masks loosely connected thereto. The mask frame is provided with a plurality of frame alignment cavities, and each mask is provided with a plurality of mask alignment cavities. The system further includes a platen for holding workpieces. The platen may be provided with a plurality of mask alignment pins and frame alignment pins configured to engage the mask alignment cavities and frame alignment cavities, respectively. The mask frame can be lowered onto the platen, with the frame alignment cavities moving into registration with the frame alignment pins to provide rough alignment between the masks and workpieces. The mask alignment cavities are then moved into registration with the mask alignment pins, thereby shifting each individual mask into precise alignment with a respective workpiece.
    Type: Grant
    Filed: December 10, 2013
    Date of Patent: February 14, 2017
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Aaron P. Webb, Charles T. Carlson, William T. Weaver, Christopher N. Grant
  • Publication number: 20140169402
    Abstract: An ion implant apparatus configured to measure the temperature or monitor the degradation of components in the apparatus is provided. The ion implant apparatus may include a platen configured to move in a first direction, a mask frame to hold one or more masks disposed on the platen, a first optical sensor configured to project an optical beam to a second optical sensor, and a measurement bar disposed on the mask frame, the measurement bar raised above the surface of the mask frame to interrupt the optical beam when the platen moves in the first direction.
    Type: Application
    Filed: December 10, 2013
    Publication date: June 19, 2014
    Applicant: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Aaron P. Webb, Benjamin B. Riordon, Charles T. Carlson, Christopher N. Grant, Luke Bonecutter, William T. Weaver
  • Publication number: 20140165906
    Abstract: An ion implant apparatus configured to measure the temperature or monitor the degradation of components in the apparatus is provided. The ion implant apparatus may include a platen configured to move in a first direction, a mask frame to hold one or more masks disposed on the platen, a first optical sensor configured to project an optical beam to a second optical sensor, and a measurement bar disposed on the mask frame, the measurement bar raised above the surface of the mask frame to interrupt the optical beam when the platen moves in the first direction.
    Type: Application
    Filed: December 11, 2013
    Publication date: June 19, 2014
    Applicant: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Christopher N. Grant, Robert B. Vopat
  • Publication number: 20140170783
    Abstract: A mask alignment system for providing precise and repeatable alignment between ion implantation masks and workpieces. The system includes a mask frame having a plurality of ion implantation masks loosely connected thereto. The mask frame is provided with a plurality of frame alignment cavities, and each mask is provided with a plurality of mask alignment cavities. The system further includes a platen for holding workpieces. The platen may be provided with a plurality of mask alignment pins and frame alignment pins configured to engage the mask alignment cavities and frame alignment cavities, respectively. The mask frame can be lowered onto the platen, with the frame alignment cavities moving into registration with the frame alignment pins to provide rough alignment between the masks and workpieces. The mask alignment cavities are then moved into registration with the mask alignment pins, thereby shifting each individual mask into precise alignment with a respective workpiece.
    Type: Application
    Filed: December 10, 2013
    Publication date: June 19, 2014
    Applicant: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Aaron P. Webb, Charles T. Carlson, William T. Weaver, Christopher N. Grant