Patents by Inventor Christopher P. Chrobak

Christopher P. Chrobak has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Systems and methods for collector mirror temperature control using direct contact heat transfer
    Patent number: 7641349
    Abstract: As disclosed herein, a device may comprise an optic disposed in a near vacuum environment, the optic formed with a surface portion; a temperature controlled member formed with a surface portion conforming to the optic surface portion; and a liquid interposed between the optic surface portion and the member surface portion to conduct heat therebetween.
    Type: Grant
    Filed: September 22, 2008
    Date of Patent: January 5, 2010
    Assignee: Cymer, Inc.
    Inventors: Christopher P. Chrobak, Igor V. Fomenkov