Patents by Inventor Christopher P. Pate

Christopher P. Pate has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Systems and methods for cooling an optic
    Patent number: 9066412
    Abstract: Devices are described herein which may comprise an optic having a non-planar surface, the non-planar surface having an optically active portion; and a flow guide directing gas upon the non-planar surface to produce turbulent flow on at least a portion of the optically active portion of the non-planar surface to cool the optic.
    Type: Grant
    Filed: October 8, 2010
    Date of Patent: June 23, 2015
    Assignee: ASML Netherlands B.V.
    Inventors: Alexander I. Ershov, Robert L. Morse, William N. Partlo, Christopher P. Pate
  • SYSTEMS AND METHODS FOR COOLING AN OPTIC
    Publication number: 20110253349
    Abstract: Devices are described herein which may comprise an optic having a non-planar surface, the non-planar surface having an optically active portion; and a flow guide directing gas upon the non-planar surface to produce turbulent flow on at least a portion of the optically active portion of the non-planar surface to cool the optic.
    Type: Application
    Filed: October 8, 2010
    Publication date: October 20, 2011
    Applicant: Cymer, Inc.
    Inventors: Alexander I. Ershov, Robert L. Morse, William N. Partlo, Christopher P. Pate