Patents by Inventor Christopher R. Gillman

Christopher R. Gillman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Photomask image inspection
    Patent number: 7974802
    Abstract: A method optimizes photomask inspection. After masks are manufactured, the method predicts the likelihood that the masks will be defect free based on defect criteria, etch area, etch mode, and etch tool type associated with the masks. The method skips an initial mask inspection for masks that have a predictability value above a predetermined value and performs the initial mask inspection for masks that have a predictability value below the predetermined value. After initial inspection is preformed (or skipped), a pellicle is mounted on the mask and then all masks are inspected or reinspected for defects and foreign matter.
    Type: Grant
    Filed: March 7, 2008
    Date of Patent: July 5, 2011
    Assignee: International Business Machines Corporation
    Inventors: Karen D. Badger, Jim B. Densmore, Christopher R. Gillman, Kathleen G. Purdy, Cynthia Whiteside
  • Photomask Image Inspection
    Publication number: 20090228228
    Abstract: A method optimizes photomask inspection. After masks are manufactured, the method predicts the likelihood that the masks will be defect free based on defect criteria, etch area, etch mode, and etch tool type associated with the masks. The method skips an initial mask inspection for masks that have a predictability value above a predetermined value and performs the initial mask inspection for masks that have a predictability value below the predetermined value. After initial inspection is preformed (or skipped), a pellicle is mounted on the mask and then all masks are inspected or reinspected for defects and foreign matter.
    Type: Application
    Filed: March 7, 2008
    Publication date: September 10, 2009
    Applicant: International Business Machines Corporation
    Inventors: Karen D. Badger, Jim B. Densmore, Christopher R. Gillman, Kathleen G. Purdy, Cynthia Whiteside