Patents by Inventor Christopher R. Remen

Christopher R. Remen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High power excimer laser with a pulse stretcher
    Patent number: 7564888
    Abstract: An apparatus and method is disclosed which may comprise a high power excimer or molecular fluorine gas discharge laser DUV light source system which may comprise: a pulse stretcher which may comprise: an optical delay path mirror, an optical delay path mirror gas purging assembly which may comprise: a purging gas supply system directing purging gas across a face of the optical delay line mirror. The optical delay path mirror may comprise a plurality of optical delay path mirrors; the purging gas supply system may direct purging gas across a face of each of the plurality of optical delay line mirrors. The purging gas supply system may comprise: a purging gas supply line; a purging gas distributing and directing mechanism which may direct purging gas across the face of the respective optical delay path mirror.
    Type: Grant
    Filed: May 23, 2007
    Date of Patent: July 21, 2009
    Assignee: Cymer, Inc.
    Inventors: Alexander I. Ershov, James J. Ferrell, Thomas Hofmann, Daniel J. Reiley, Christopher R. Remen, Richard L. Sandstrom