Patents by Inventor Christopher R. Whitaker

Christopher R. Whitaker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for mechanical planarization
    Patent number: 4934102
    Abstract: A polishing tool for abrasively polishing a semiconductor wafer that edge clamps the wafer between two rollers. The wafer is spun-up in one plane and the rollers spin in a second plane which is orthogonal to the wafer spin plane. One of the rollers is split with each section rotating in opposite directions. Each of the rollers is mounted by a spring-gimballed assembly to follow the wafer contour.
    Type: Grant
    Filed: October 4, 1988
    Date of Patent: June 19, 1990
    Assignee: International Business Machines Corporation
    Inventors: Michael A. Leach, James K. Paulsen, Brian J. Machesney, Daniel J. Venditti, Christopher R. Whitaker