Abstract: A lighting configuration is provided for utilization with a metrology system. The metrology system includes a camera that provides images of a workpiece at different focus positions (e.g., through operation of a variable focal length lens). The lighting configuration includes a plurality of lighting portions which illuminate the workpiece for the imaging. The lighting portions are distributed in an arrangement (e.g., an annular arrangement) in which an imaging lens portion of each lighting portion directs light toward a central volume (e.g., for which illumination in the central volume may be relatively uniform in X, Y and Z axis directions). Each imaging lens portion may include at least two lenses in a telecentric arrangement. Each lighting portion may comprise an optical homogenizer. The camera acquires a stack of images of the workpiece, from which focus curve data may be determined which indicates 3 dimensional positions of surface points on the workpiece.

Abstract: An inductive position detection configuration for stylus position measurement in a scanning probe comprises a stylus position detection portion arranged along a central axis in the probe. The stylus position detection portion includes a field generating coil configuration and top and bottom axial and rotary sensing coil configurations. The field generating coil configuration generates a changing magnetic flux, and coil signals indicate conductive disruptor element and/or stylus positions. A field generating coil coupling and crosstalk reducing configuration couples signal processing and control circuitry to the field generating coil configuration to provide a coil drive signal, and is configured to reduce crosstalk that would otherwise occur if the field generating coil configuration were directly connected to the signal processing and control circuitry without the field generating coil coupling and crosstalk reducing configuration.

Abstract: A modular configuration for a scanning probe for a coordinate measuring machine include a stylus suspension module, a stylus position detection module, and a signal processing and control circuitry module. The stylus position detection module is configured to be assembled separately from the stylus suspension module before mounting to the stylus suspension module. The signal processing and control circuitry module is configured to be assembled separately from the stylus position detection module and the stylus suspension module before rigidly coupling to the stylus position detection module as part of assembling the scanning probe.

Abstract: A scanning probe for a coordinate measurement machine includes a stylus suspension module, a stylus position detection module, a disruptor configuration, and a signal processing and control circuitry module. The stylus position detection module includes a sensor configuration, which comprises various coils, and a shield configuration that is located around the sensor configuration and comprises electrically conductive material for shielding the sensor configuration. The stylus position detection module is mounted to the stylus suspension module utilizing a module mounting configuration, which enables the relative position of the sensor configuration to be adjusted for alignment during the assembly of the scanning probe.

Abstract: A modular configuration for a scanning probe for a coordinate measuring machine include a stylus suspension module, a stylus position detection module, and a signal processing and control circuitry module. The stylus position detection module is configured to be assembled separately from the stylus suspension module before mounting to the stylus suspension module. The signal processing and control circuitry module is configured to be assembled separately from the stylus position detection module and the stylus suspension module before rigidly coupling to the stylus position detection module as part of assembling the scanning probe.

Abstract: A scanning probe for a coordinate measurement machine includes a stylus suspension module, a stylus position detection module, a disruptor configuration, and a signal processing and control circuitry module. The stylus position detection module includes a sensor configuration, which comprises various coils, and a shield configuration that is located around the sensor configuration and comprises electrically conductive material for shielding the sensor configuration. The stylus position detection module is mounted to the stylus suspension module utilizing a module mounting configuration, which enables the relative position of the sensor configuration to be adjusted for alignment during the assembly of the scanning probe.

Abstract: A scanning probe for a coordinate measuring machine with inductive position sensor signal gain control is provided. The scanning probe includes a stylus position detection portion with field generating and sensing coils, and for which corresponding output signals are indicative of a position of the probe tip of the stylus. Signal processing and control circuitry is configured to implement different operating regions, such as a central high gain operating region which corresponds to a central probe tip position range, as well as other lower gain operating regions, and for which transition operations may be performed for adjusting the gain. In various implementations, transition operations for adjusting a gain may include operations such as: adjusting power to a field generating coil configuration; adjusting a gain of a front end amplifier; altering characteristics of sensing coils; adjusting an input range of an analog to digital converter, etc.

Abstract: An inductive position detector for stylus position measurement in a scanning probe comprises a coil board configuration located along a central axis in the probe. The coil board configuration includes a field generating coil configuration that surrounds a hole in the coil board configuration, a top axial sensing coil configuration and a bottom axial sensing coil configuration, and N top rotary sensing coils and N bottom rotary sensing coils. A stylus-coupled disruptor configuration includes a cylindrical disruptor element that is configured to move and fit within the hole of the coil board configuration, and moves along Z (axial) and X-Y (rotary) directions in a motion volume. The field generating coil configuration generates a changing magnetic flux (e.g., encompassing all or at least part of the cylindrical disruptor element), and coil signals indicate the cylindrical disruptor element and/or stylus positions.

Abstract: An inductive position detector for stylus position measurement in a scanning probe comprises a coil board configuration located along a central axis in the probe. The coil board configuration includes a field generating coil configuration and top and bottom axial and rotary sensing coil configurations. The field generating coil configuration generates a changing magnetic flux, and coil signals indicate conductive disruptor element and/or stylus positions. At least one misalignment compensation element is configured to reduce a signal offset that results from a misalignment of at least one coil of the coil board configuration (e.g., the coil board configuration may comprise a printed circuit board with a plurality of layers in which the coils are located and the misalignment of the at least one coil may result from a registration error, such as within manufacturing tolerances, in a layer to layer registration as part of a fabrication process).

Abstract: A scanning probe for a coordinate measuring machine with inductive position sensor signal gain control is provided. The scanning probe includes a stylus position detection portion with field generating and sensing coils, and for which corresponding output signals are indicative of a position of the probe tip of the stylus. Signal processing and control circuitry is configured to implement different operating regions, such as a central high gain operating region which corresponds to a central probe tip position range, as well as other lower gain operating regions, and for which transition operations may be performed for adjusting the gain. In various implementations, transition operations for adjusting a gain may include operations such as: adjusting power to a field generating coil configuration; adjusting a gain of a front end amplifier; altering characteristics of sensing coils; adjusting an input range of an analog to digital converter, etc.

Abstract: An inductive position detection configuration for stylus position measurement in a scanning probe comprises a stylus position detection portion arranged along a central axis in the probe. The stylus position detection portion includes a field generating coil configuration and top and bottom axial and rotary sensing coil configurations. The field generating coil configuration generates a changing magnetic flux, and coil signals indicate conductive disruptor element and/or stylus positions. A field generating coil coupling and crosstalk reducing configuration couples signal processing and control circuitry to the field generating coil configuration to provide a coil drive signal, and is configured to reduce crosstalk that would otherwise occur if the field generating coil configuration were directly connected to the signal processing and control circuitry without the field generating coil coupling and crosstalk reducing configuration.

Abstract: An inductive position detector for stylus position measurement in a scanning probe comprises a coil board configuration located along a central axis in the probe. The coil board configuration includes a field generating coil configuration that surrounds a hole in the coil board configuration, a top axial sensing coil configuration and a bottom axial sensing coil configuration, and N top rotary sensing coils and N bottom rotary sensing coils. A stylus-coupled disruptor configuration includes a cylindrical disruptor element that is configured to move and fit within the hole of the coil board configuration, and moves along Z (axial) and X-Y (rotary) directions in a motion volume. The field generating coil configuration generates a changing magnetic flux (e.g., encompassing all or at least part of the cylindrical disruptor element), and coil signals indicate the cylindrical disruptor element and/or stylus positions.

Abstract: An inductive position detector for stylus position measurement in a scanning probe comprises a coil board configuration located along a central axis in the probe. The coil board configuration includes a field generating coil configuration and top and bottom axial and rotary sensing coil configurations. The field generating coil configuration generates a changing magnetic flux, and coil signals indicate conductive disruptor element and/or stylus positions. At least one misalignment compensation element is configured to reduce a signal offset that results from a misalignment of at least one coil of the coil board configuration (e.g., the coil board configuration may comprise a printed circuit board with a plurality of layers in which the coils are located and the misalignment of the at least one coil may result from a registration error, such as within manufacturing tolerances, in a layer to layer registration as part of a fabrication process).

Abstract: An inductive position detector (IPD) for stylus position measurement in a scanning probe comprises a coil board configuration located along a central axis in the probe with a motion volume extending on opposite sides of the coil board configuration. The coil board configuration includes N top rotary sensing coils (RSCs) and a top axial sensing coil configuration (ASCC), and N bottom RSCs and a bottom ASCC. A pair of stylus-coupled conductive disruptors move along Z (axial) and X-Y (rotary) directions in the motion volume. A generating coil (GC) of the coil board configuration generates a changing magnetic flux (e.g., encompassing all or at least part of the disruptors), and coil signals indicate the disruptors and/or stylus positions. Areas of the conductive disruptors may be larger than an area of the generating coil in some implementations, and the conductive disruptors may each comprise a plurality of concentric conductive loops, spirals, etc.

Abstract: An inductive position detector (IPD) for stylus position measurement in a scanning probe comprises a coil board configuration located along a central axis in the probe with a motion volume extending on opposite sides of the coil board configuration. The coil board configuration includes N top rotary sensing coils (RSCs) and a top axial sensing coil configuration (ASCC), and N bottom RSCs and a bottom ASCC. A pair of stylus-coupled conductive disruptors move along Z (axial) and X-Y (rotary) directions in the motion volume. A generating coil (GC) of the coil board configuration generates a changing magnetic flux (e.g., encompassing all or at least part of the disruptors), and coil signals indicate the disruptors and/or stylus positions. Areas of the conductive disruptors may be larger than an area of the generating coil in some implementations, and the conductive disruptors may each comprise a plurality of concentric conductive loops, spirals, etc.