Patents by Inventor Christopher Richard Mahon

Christopher Richard Mahon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE SUPPORT ASSEMBLY
    Publication number: 20080190364
    Abstract: A substrate support assembly supports a substrate in a process zone of a process chamber. The substrate support assembly has a support block having an electrode and an arm to hold the support block in the process chamber, the arm having a channel therethrough. The arm has a first clamp to attach to the support block and a second clamp to attach to a chamber component. A silicon cover lock comprising an annular disc shaped and sized to seat in the arm beneath the first clamp to cover and seal off the electrical conductors from the chamber environment.
    Type: Application
    Filed: February 13, 2007
    Publication date: August 14, 2008
    Inventors: Christopher Richard Mahon, Abhijit Desai, Robert T. Hirahara
  • Substrate support assembly
    Patent number: 7045014
    Abstract: A substrate support assembly supports a substrate in a process chamber. The substrate support assembly has a support block having an electrode and an arm to hold the support block in the process chamber, the arm having a channel therethrough. The arm has a first clamp to attach to the support block and a second clamp to attach to the process chamber. A plurality of electrical conductors pass through the channel of the arm, and a ceramic insulator is between the conductors.
    Type: Grant
    Filed: April 24, 2003
    Date of Patent: May 16, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Christopher Richard Mahon, Abhijit Desai
  • Substrate support assembly
    Publication number: 20040226514
    Abstract: A substrate support assembly supports a substrate in a process chamber. The substrate support assembly has a support block having an electrode and an arm to hold the support block in the process chamber, the arm having a channel therethrough. The arm has a first clamp to attach to the support block and a second clamp to attach to the process chamber. A plurality of electrical conductors pass through the channel of the arm, and a ceramic insulator is between the conductors.
    Type: Application
    Filed: April 24, 2003
    Publication date: November 18, 2004
    Applicant: Applied Materials, Inc.
    Inventors: Christopher Richard Mahon, Abhijit Desai