Patents by Inventor Christopher Rossi VANN

Christopher Rossi VANN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for and method cleaning a support inside a lithography apparatus
    Patent number: 11480885
    Abstract: An apparatus for and method of cleaning a surface of a support structure in a lithographic system in which a cleaning substrate has at least one motor which causes the cleaning substrate to move laterally across the surface. The cleaning substrate may be provided with a power supply mounted on the cleaning substrate and selectably electrically connectable to the motor.
    Type: Grant
    Filed: October 22, 2019
    Date of Patent: October 25, 2022
    Assignee: ASML Holding N. V.
    Inventors: James Hamilton Walsh, Richard John Johnson, Christopher Rossi Vann
  • APPARATUS FOR AND METHOD CLEANING A SUPPORT INSIDE A LITHOGRAPHY APPARATUS
    Publication number: 20220004112
    Abstract: An apparatus for and method of cleaning a surface of a support structure in a lithographic system in which a cleaning substrate has at least one motor which causes the cleaning substrate to move laterally across the surface. The cleaning substrate may be provided with a power supply mounted on the cleaning substrate and selectably electrically connectable to the motor.
    Type: Application
    Filed: October 22, 2019
    Publication date: January 6, 2022
    Applicant: ASML Holding N.V.
    Inventors: James Hamilton WALSH, Richard John JOHNSON, Christopher Rossi VANN