Patents by Inventor Christopher S. Birchard

Christopher S. Birchard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pressure Assisted Wafer Holding Apparatus and Control Method
    Publication number: 20090034151
    Abstract: An electrostatic wafer holding apparatus includes an electrostatic chucking pedestal and a bi-directional backside conduit in fluid communication with a backside of the chucking pedestal. The bi-directional backside conduit is in fluid communication with a backside carrier gas supply line, and is further in fluid communication with a vacuum supply line.
    Type: Application
    Filed: October 9, 2008
    Publication date: February 5, 2009
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: David J. Bain, Christopher S. Birchard, Keith Kwong-Hon Wong
  • Pressure assisted wafer holding apparatus and control method
    Patent number: 7457097
    Abstract: An electrostatic wafer holding apparatus includes an electrostatic chucking pedestal and a bi-directional backside conduit in fluid communication with a backside of the chucking pedestal. The bi-directional backside conduit is in fluid communication with a backside carrier gas supply line, and is further in fluid communication with a vacuum supply line.
    Type: Grant
    Filed: July 27, 2004
    Date of Patent: November 25, 2008
    Assignee: International Business Machines Corporation
    Inventors: David J. Bain, Christopher S. Birchard, Keith Kwong-Hon Wong