Patents by Inventor Christopher S. Gudeman
Christopher S. Gudeman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20170237228Abstract: A microfabricated optical apparatus that includes a light source driven by a waveform, a turning mirror, and a beam shaping element, wherein the waveform is delivered to the light source by at least one through silicon via. The microfabricated optical apparatus may also include a light-sensitive receiver which generates an electrical signal in response to an optical signal. The electrical signal may be communicated to external devices by at least one additional through silicon via.Type: ApplicationFiled: September 22, 2016Publication date: August 17, 2017Applicant: Innovative Micro TechnologyInventor: Christopher S. GUDEMAN
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Publication number: 20170217767Abstract: A through substrate via is formed by disposing a quantity of solder material at the top of a through hole formed in a substrate, coating the hole with a wetting layer, and melting the solder material such that it flows into the hole. The solder material may alloy with the wetting layer, freezing upon formation of the alloy. Subsequent processing steps may be performed at temperatures higher than the melting point of the solder material.Type: ApplicationFiled: January 26, 2017Publication date: August 3, 2017Applicant: Innovative Micro TechnologyInventors: Christopher S. GUDEMAN, Stuart Hutchinson
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Publication number: 20170146793Abstract: A microfabricated optical apparatus that includes a light source or light detector in combination with an integrated turning surface to form a microfabricated optical subassembly. The integrated turning surface may be formed directly in the substrate material using gray scale lithography.Type: ApplicationFiled: November 18, 2016Publication date: May 25, 2017Applicant: Innovative Micro TechnologyInventors: Christopher S. GUDEMAN, Sangwoo Kim, Stuart Hutchinson, Marin SIGURDSON
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Publication number: 20170126323Abstract: A microfabricated optical apparatus that includes a light source driven by a waveform, a turning mirror, and a beam shaping element, wherein the waveform is delivered to the light source by at least one through silicon via.Type: ApplicationFiled: January 18, 2017Publication date: May 4, 2017Applicant: Innovative Micro TechnologyInventor: Christopher S. GUDEMAN
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Patent number: 9608731Abstract: A microfabricated optical apparatus that includes a light source driven by a waveform, a turning mirror, and a beam shaping element, wherein the waveform is delivered to the light source by at least one through silicon via.Type: GrantFiled: November 4, 2015Date of Patent: March 28, 2017Assignee: Innovative Micro TechnologyInventor: Christopher S. Gudeman
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Publication number: 20170062165Abstract: An MEMS device, having two substantially parallel surfaces are separated by an initial distance. At least one of the surfaces includes a raised feature that limits the gap between the surfaces to less than the initial distance when an actuating voltage is applied. In some embodiments, the raised feature limits the gap to about 66% of the initial distance.Type: ApplicationFiled: August 10, 2016Publication date: March 2, 2017Applicant: Innovative Micro TechnologyInventors: Christopher S. GUDEMAN, Paul J. RUBEL
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Publication number: 20160343684Abstract: A method for bonding two substrates is described, comprising providing a first and a second silicon substrate, providing a raised feature on at least one of the first and the second silicon substrate, forming a layer of gold on the first and the second silicon substrates, and pressing the first substrate against the second substrate, to form a thermocompression bond around the raised feature. The high initial pressure caused by the raised feature on the opposing surface provides for a hermetic bond without fracture of the raised feature, while the complete embedding of the raised feature into the opposing surface allows for the two bonding planes to come into contact. This large contact area provides for high strength.Type: ApplicationFiled: May 9, 2016Publication date: November 24, 2016Inventors: Christopher S. GUDEMAN, Paul J. RUBEL
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Publication number: 20160268084Abstract: Systems and methods for forming an electrostatic MEMS switch include forming a movable cantilevered beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate. The cantilevered beam may be formed by etching the perimeter shape in the device layer of an SOI substrate. An additional void may be formed in the movable beam such that it bends about an additional hinge line as a result of the additional void. This may give the beam and switch advantageous kinematic characteristics.Type: ApplicationFiled: March 4, 2016Publication date: September 15, 2016Applicant: Innovative Micro TechnologyInventors: Christopher S. GUDEMAN, Paul J. RUBEL, Marin Sigurdson
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Publication number: 20160126696Abstract: A microfabricated optical apparatus that includes a light source driven by a waveform, a turning mirror, and a beam shaping element, wherein the waveform is delivered to the light source by at least one through silicon via.Type: ApplicationFiled: November 4, 2015Publication date: May 5, 2016Applicant: Innovative Micro TechnologyInventor: Christopher S. GUDEMAN
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Patent number: 9162878Abstract: Systems and methods for forming an encapsulated device include a substantially hermetic seal which seals a device in an environment between two substrates. The substantially hermetic seal is formed by an alloy of two metal layers, one having a lower melting temperature than the other. The metal layers may be deposited two substrates, along with a raised feature formed under at least one of the metal layers. The two metals may form an alloy of a predefined stoichiometry in at least two locations on either side of the midpoint of the raised feature. The formation of the alloy may be improved by the use of an organic wetting layer adjacent to the lower melting temperature metal. Design guidelines are set forth for reducing or eliminating the leakage of molten metal into the areas adjacent to the bondlines.Type: GrantFiled: March 2, 2014Date of Patent: October 20, 2015Assignee: Innovative Micro TechnologyInventors: Christopher S Gudeman, Prosenjit Sen
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Publication number: 20150266726Abstract: Systems and methods for forming an encapsulated device include a substantially hermetic seal which seals a device in an environment between two substrates. The substantially hermetic seal is formed by an alloy of two metal layers, one having a lower melting temperature than the other. The metal layers may be deposited two substrates, along with a raised feature formed under at least one of the metal layers. The two metals may form an alloy of a predefined stoichiometry in at least two locations on either side of the midpoint of the raised feature. The formation of the alloy may be improved by the use of an organic wetting layer adjacent to the lower melting temperature metal. Design guidelines are set forth for reducing or eliminating the leakage of molten metal into the areas adjacent to the bondlines.Type: ApplicationFiled: March 2, 2014Publication date: September 24, 2015Applicant: Innovative Micro TechnologyInventors: Christopher S. GUDEMAN, Prosenjit Sen
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Publication number: 20150069618Abstract: A method for forming through substrate vias (TSVs) in a non-conducting, glass substrate is disclosed. The method involves patterning a silicon template substrate with a plurality of lands and spaces, bonding a slab or wafer of glass to the template substrate, and melting the glass so that it flows into the spaces formed in the template substrate. The template substrate may then be removed to leave a plurality of TSVs in the glass slab or wafer.Type: ApplicationFiled: September 11, 2013Publication date: March 12, 2015Applicant: Innovative Micro TechnologyInventors: Christopher S. Gudeman, Prosenjit Sen
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Patent number: 8847373Abstract: An approach to obtain localized heat within a sealed vacuum cavity is disclosed. The approach uses an exothermic reaction between two reactants to generate heat in the vicinity of a structure, such as a getter material or a bondline that is heat activated. The exothermic reaction can be initiated by application of laser light, or application of current to a current-carrying conductor in the vicinity of the reactants.Type: GrantFiled: May 7, 2013Date of Patent: September 30, 2014Assignee: Innovative Micro TechnologyInventors: Jeffery F. Summers, Christopher S. Gudeman, Jaquelin K. Spong
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Patent number: 8808256Abstract: A punctal plug or lacrimal insert comprising a microelectromechanical system pump and associated reservoir may be utilized to deliver precise dosages of an active agent into the eye though the tear film. The microelectromechanical system pump comprises four main components; namely, a reservoir, a pump, a series of valves and a vent. The microelectromechanical system pump is positioned within a cavity in the punctal plug. The microelectromechanical system pump is positioned with a cavity in the punctal plug.Type: GrantFiled: January 16, 2012Date of Patent: August 19, 2014Assignee: Johnson & Johnson Vision Care, Inc.Inventors: Stephen R. Beaton, Michael Ferran, Justin Scott Jacobs, Jason M. Tokarski, Christopher S. Gudeman, Fardad Chamran, Paul J. Rubel, Bret A. Coldren
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Patent number: 8736081Abstract: Systems and methods for forming an encapsulated device include a hermetic seal which seals an insulating environment between two substrates, one of which supports the device. The hermetic seal is formed by an alloy of two metal layers, one deposited on a first substrate and the other deposited on the second substrate. At least one of the substrates may include a raised feature formed under at least one of the metal layers. The two metals may for an alloy of a predefined stoichiometry in at least two locations on either side of the midpoint of the raised feature. This alloy may have advantageous features in terms of density, mechanical, electrical or physical properties that may improve the hermeticity of the seal, for example.Type: GrantFiled: August 30, 2012Date of Patent: May 27, 2014Assignee: Innovative Micro TechnologyInventors: John S. Foster, Christopher S. Gudeman, Alok Paranjpye, Jaquelin K. Spong, Douglas L. Thompson
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Patent number: 8690830Abstract: A micromechanical pumping system is formed on a substrate surface. The pumping system uses a pumping element which pumps a fluid through valves which move in a plane substantially parallel to the substrate surface. An electromagnetic actuating mechanism may also be fabricated on the surface of the substrate. Magnetic flux produced by a coil around a permeable core may be coupled to a permeable member affixed to a pumping element. The permeable member and pumping element may be configured to move in a plane parallel to the substrate. The electromagnetic actuating mechanism gives the pumping system a large throw and substantial force, such that the fluid pumped by the pumping system may be pumped through a transdermal cannula to deliver a therapeutic substance to the tissue underlying the skin of a patient.Type: GrantFiled: May 26, 2010Date of Patent: April 8, 2014Assignee: Innovative Micro TechnologyInventors: Gregory A. Carlson, John S. Foster, Christopher S. Gudeman, Steven S. Hovey, Paul J. Rubel
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Publication number: 20130184661Abstract: A punctal plug or lacrimal insert comprising a microelectromechanical system pump and associated reservoir may be utilized to deliver precise dosages of an active agent into the eye though the tear film. The microelectromechanical system pump comprises four main components; namely, a reservoir, a pump, a series of valves and a vent. The microelectromechanical system pump is positioned within a cavity in the punctal plug. The microelectromechanical system pump is positioned with a cavity in the punctal plug.Type: ApplicationFiled: January 16, 2012Publication date: July 18, 2013Inventors: Stephen R. Beaton, Michael Ferran, Justin Scott Jacobs, Jason M. Tokarski, Christopher S. Gudeman, Fardad Chamran, Paul J. Rubel, Bret A. Coldren
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Patent number: 8466760Abstract: Systems and methods for forming a configurable power supply uses a plurality of dual substrate MEMS switches to couple a plurality of power cells to provide a selectable, or variable, output voltage. The same circuit may output two different voltages to power two different circuits of the device, or may distribute the load evenly amongst the cells. Thus, the configurable power supply may extend the lifetime and improve the reliability of the device, or decrease its weight, size and cost.Type: GrantFiled: January 11, 2011Date of Patent: June 18, 2013Assignee: Innovative Micro TechnologyInventors: John S. Foster, Christopher S. Gudeman
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Publication number: 20120319303Abstract: Systems and methods for forming an encapsulated device include a hermetic seal which seals an insulating environment between two substrates, one of which supports the device. The hermetic seal is formed by an alloy of two metal layers, one deposited on a first substrate and the other deposited on the second substrate. At least one of the substrates may include a raised feature formed under at least one of the metal layers. The two metals may for an alloy of a predefined stoichiometry in at least two locations on either side of the midpoint of the raised feature. This alloy may have advantageous features in terms of density, mechanical, electrical or physical properties that may improve the hermeticity of the seal, for example.Type: ApplicationFiled: August 30, 2012Publication date: December 20, 2012Applicant: Innovative Micro TechnologyInventors: John S. Foster, Alok Paranjpye, Douglas L. Thompson, Christopher S. Gudeman, Jaquelin K. Spong
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Publication number: 20110295229Abstract: A micromechanical pumping system is formed on a substrate surface. The pumping system uses a pumping element which pumps a fluid through valves which move in a plane substantially parallel to the substrate surface. An electromagnetic actuating mechanism may also be fabricated on the surface of the substrate. Magnetic flux produced by a coil around a permeable core may be coupled to a permeable member affixed to a pumping element. The permeable member and pumping element may be configured to move in a plane parallel to the substrate. The electromagnetic actuating mechanism gives the pumping system a large throw and substantial force, such that the fluid pumped by the pumping system may be pumped through a transdermal cannula to deliver a therapeutic substance to the tissue underlying the skin of a patient.Type: ApplicationFiled: May 26, 2010Publication date: December 1, 2011Applicant: Innovative Micro TechnologyInventors: Gregory A. Carlson, John S. Foster, Christopher S. Gudeman, Steven S. Hovey, Paul J. Rubel