Abstract: An improved micro machine has at least a first element which is moveable relative to a second element such that the first and second elements can be in contact with each other. The contacting portions of both the first and second elements are protected with a long-lasting lubricant to prevent the elements from sticking or adhering to each other. The lubricant is a polar low molecular weight compound preferably applied as a vapor. This class of low molecular weight lubricants consists of acetone, ethanol, ethylene glycol, glycerol, isopropanol, methanol, and water. According to the disclosure a lubricant has a low molecular weight if its molecular weight is less than ˜100 amu, or has a vapor pressure ≧5 Torr at room temperature. The preferred micro machine is a GLV wherein the bottom of the deformable ribbon contacts the landing electrode when the reflector is in a down position (close to the substrate).

Abstract: An improved micro machine has at least a first element which is moveable relative to a second element such that the first and second elements can be in contact with each other. The contacting portions of both the first and second elements are protected with a long-lasting lubricant to prevent the elements from sticking or adhering to each other. The lubricant is a polar low molecular weight compound preferably applied as a vapor. This class of low molecular weight lubricants consists of acetone, ethanol, ethylene glycol, glycerol, isopropanol, methanol, and water. According to the disclosure a lubricant has a low molecular weight if its molecular weight is less than .about.100 amu, or has a vapor pressure .gtoreq.5 Torr at room temperature. The preferred micro machine is a GLV wherein the bottom of the deformable ribbon contacts the landing electrode when the reflector is in a down position (close to the substrate).