Abstract: An automated signature detection system and method of use and, more particularly, a predictive modeling component configured to accurately predict maintenance events for optical elements used in lithographic tools. The system comprises at least one module configured to analyze data associated with power illumination at a surface. The at least one module also is configured to fit a curve to the analyzed data using an exponentially based decay model.

Abstract: An automated signature detection system and method of use and, more particularly, a predictive modeling component configured to accurately predict maintenance events for optical elements used in lithographic tools. The system comprises at least one module configured to analyze data associated with power illumination at a surface. The at least one module also is configured to fit a curve to the analyzed data using an exponentially based decay model.

Abstract: This invention is a garment de-wrinkler that includes a garment bag with a threaded opening in the bottom thereof. A device for controlling the interior environment of the garment bag is inserted into the opening in the bag. The environmental controller is in the form of an exterior canister that is open at both end with a fan mounted adjacent the exterior end. A second canister is mounted interiorly of the exterior canister and includes heating electrodes to create steam from the water or other liquid contained in the interior canister. Air heating elements are provided in the area between the interior wall of the exterior canister and the exterior wall of the interior canister so that when ambient air is blown over the coil the air will be heated prior to entering the garment bag.