Patents by Inventor Christopher Todd Fulmer

Christopher Todd Fulmer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for automatically controlling gas flow in a substrate processing system
    Publication number: 20040050326
    Abstract: A fluid delivery system for providing fluids to a substrate processing system. The fluid delivery system may include a first manifold having a first inlet, a first outlet, and a second outlet, wherein the first outlet and the second outlet are coupled to the substrate processing system. The fluid delivery system mat further include a first conduit for coupling a first fluid to the first inlet and a flow controller for controlling the flow of the first fluid through the first conduit. The fluid delivery system may also include a computer controlled metering valve coupled to the first outlet.
    Type: Application
    Filed: September 12, 2002
    Publication date: March 18, 2004
    Inventors: Karin Anna Lena Thilderkvist, Christopher Todd Fulmer, Paul Comita, Annie A. Karpati