Abstract: One example of an inspection system includes a laser, a magnification changer, and a first camera. The laser projects a line onto a wafer to be inspected. The magnification changer includes a plurality of selectable lenses of different magnification. The first camera images the line projected onto the wafer and outputs three-dimensional line data indicating the height of features of the wafer. Each lens of the magnification changer provides the same nominal focal plane position of the first camera with respect to the wafer.

Abstract: One example of an inspection system includes a laser, a magnification changer, and a first camera. The laser projects a line onto a wafer to be inspected. The magnification changer includes a plurality of selectable lenses of different magnification. The first camera images the line projected onto the wafer and outputs three-dimensional line data indicating the height of features of the wafer. Each lens of the magnification changer provides the same nominal focal plane position of the first camera with respect to the wafer.

Abstract: One example of an inspection system includes a laser, a magnification changer, and a first camera. The laser projects a line onto a wafer to be inspected. The magnification changer includes a plurality of selectable lenses of different magnification. The first camera images the line projected onto the wafer and outputs three-dimensional line data indicating the height of features of the wafer. Each lens of the magnification changer provides the same nominal focal plane position of the first camera with respect to the wafer.

Abstract: Wafer edge inspection approaches are disclosed wherein an imaging device captures at least one image of an edge of a wafer. The at least one image can be analyzed in order to identify an edge bead removal line. An illumination system having a diffuser can further be used in capturing images.

Abstract: Wafer edge inspection approaches are disclosed wherein an imaging device captures at least one image of an edge of a wafer. The at least one image can be analyzed in order to identify an edge bead removal line. An illumination system having a diffuser can further be used in capturing images.

Abstract: Wafer edge inspection approaches are disclosed wherein an imaging device captures at least one image of an edge of a wafer. The at least one image can be analyzed in order to identify an edge bead removal line. An illumination system having a diffuser can further be used in capturing images.

Abstract: The present invention relates to a self-locking strap assembly. The assembly includes a buckle having an outer concave surface and a passageway. A strap is secured to the buckle at a first position and is adapted to be inserted into the passageway at a second position. A retainer is coupled to the buckle and adapted to engage the strap such that movement in one direction of the strap in the passageway relative to the buckle is inhibited.

Abstract: A pyrotechnical composition for delay elements comprising metallic antimony and potassium permanganate are disclosed. The pyrotechnical composition can contain 0.1 to 2.08 percent of a light metal in powder form. It is useful as a delay composition in time fuses having burning time intervals of over 150 milliseconds.

Abstract: An instantaneous detonator has a detonator casing containing a primary charge and a secondary charge with fuze wires extending from outside the casing to an electrically actuated ignitor system located in the casing. An insert member is positioned in the detonator casing. This member has a continuous axial bore extending therethrough and includes a cross-sectional constriction. The bore is formed on one side of the constriction as a charge chamber that contains the primary charge and that faces the secondary charge and is formed, on the other side of the constriction, as a charge-free vacant chamber that faces the ignitor system. The insert member has a thick-wall section at least in that portion laterally surrounding the charge chamber, and the constriction has a configuration for preventing ignition of the primary charge by pressure forces exerted by air in the detonator casing compressed by detonation of an explosive acting on the exterior of the detonator casing.