Patents by Inventor Christopher Vreje OHANIAN

Christopher Vreje OHANIAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and methods for vacuum-compatible substrate thermal management
    Patent number: 8693856
    Abstract: One embodiment relates to an apparatus for vacuum-compatible substrate thermal management. The apparatus includes a load-lock chamber coupled to a vacuum chamber, a light-emitting diode array, and a substrate stage. The load-lock chamber is configured to hold a substrate prior to the substrate being transferred into the vacuum chamber, and a substrate stage is configured to hold the substrate in the vacuum chamber. The light-emitting diode array is configured to warm the substrate while the substrate is in the load-lock chamber. Other features, aspects and embodiments are also disclosed.
    Type: Grant
    Filed: September 3, 2010
    Date of Patent: April 8, 2014
    Assignee: KLA-Tencor Corporation
    Inventors: Jason Keith Rowan, Li-Min Chen, Roni Robinzon, Christopher Vreje Ohanian
  • Apparatus and Methods for Vacuum-Compatible Substrate Thermal Management
    Publication number: 20120057856
    Abstract: One embodiment relates to an apparatus for vacuum-compatible substrate thermal management. The apparatus includes a load-lock chamber coupled to a vacuum chamber, a light-emitting diode array, and a substrate stage. The load-lock chamber is configured to hold a substrate prior to the substrate being transferred into the vacuum chamber, and a substrate stage is configured to hold the substrate in the vacuum chamber. The light-emitting diode array is configured to warm the substrate while the substrate is in the load-lock chamber. Other features, aspects and embodiments are also disclosed.
    Type: Application
    Filed: September 3, 2010
    Publication date: March 8, 2012
    Inventors: Jason Keith ROWAN, Li-Min CHEN, Roni ROBINZON, Christopher Vreje OHANIAN