Abstract: A process for the modification of carbon-containing substrates, including 1-dimensional nanowire and nanofiber structures. In the process, polymeric material is deposited on a surface of the carbon containing-substrates using physical vapor deposition. The deposition process may be carried out under controlled conditions to produce a variety of useful modifications, including modifications at discrete intervals, as well as functional modifications. Also disclosed are carbon fibers, carbon nanowires, carbon nanotubes and nano-hybrid structures made by the modification processes of the present invention.