Patents by Inventor Christos Christou

Christos Christou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Indirectly heated button cathode for an ion source
    Patent number: 6878946
    Abstract: An indirectly heated button cathode for use in the ion source of an ion implanter has a button member formed of a slug piece mounted in a collar piece. The slug piece is thermally insulated from the collar piece to enable it to operate at a higher temperature so that electron emission is enhanced and concentrated over the surface of the slug piece. The slug piece and collar piece can be both of tungsten. Instead the slug piece may be of tantalum to provide a lower thermionic work function. The resultant concentrated plasma in the ion source is effective to enhance the production of higher charge state ions, particularly P+++ for subsequent acceleration for high energy implantation.
    Type: Grant
    Filed: September 30, 2002
    Date of Patent: April 12, 2005
    Assignee: Applied Materials, Inc.
    Inventors: Marvin Farley, Takao Sakase, Shu Satoh, Geoffrey Ryding, Peter Rose, Christos Christou
  • Indirectly heated button cathode for an ion source
    Publication number: 20040061068
    Abstract: An indirectly heated button cathode for use in the ion source of an ion implanter has a button member formed of a slug piece mounted in a collar piece. The slug piece is thermally insulated from the collar piece to enable it to operate at a higher temperature so that electron emission is enhanced and concentrated over the surface of the slug piece. The slug piece and collar piece can be both of tungsten. Instead the slug piece may be of tantalum to provide a lower thermionic work function. The resultant concentrated plasma in the ion source is effective to enhance the production of higher charge state ions, particularly P+++ for subsequent acceleration for high energy implantation.
    Type: Application
    Filed: September 30, 2002
    Publication date: April 1, 2004
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Marvin Farley, Takao Sakase, Shu Satoh, Geoffrey Ryding, Peter Rose, Christos Christou