Patents by Inventor Christos Monovoukas

Christos Monovoukas has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20080286441
    Abstract: An apparatus for the rotational coating of a surface of a substrate with a fluid, in particular the surface of a wafer with a polymer liquid, especially with a photoresist includes a rotary plate (2) for receiving the substrate (11), a drive device (3) for rotating the rotary plate (2), a dispensing nozzle (4) for the application of a predeterminable quantity of fluid onto the surface of the substrate (11) for the purpose of forming a layer (12) and also a pump (5) for conveying the fluid, the pump being connectable, on the one hand, to a source (20) for the fluid and, on the other hand, to the dispensing nozzle (4). A viscosimeter (6) is provided with which the actual viscosity of the fluid can be determined by physical measurement prior to the application of the fluid. Furthermore a corresponding method is proposed.
    Type: Application
    Filed: May 4, 2007
    Publication date: November 20, 2008
    Applicant: Levitronix LLC
    Inventors: Woo Sok Chang, Christos Monovoukas, Reto Schoeb