Patents by Inventor Chu-Fa CHAN

Chu-Fa CHAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma processing device
    Patent number: 9922803
    Abstract: The invention provides a plasma processing device, wherein the upper electrode and the lower electrode are in the vacuum chamber. The chip is placed in the lower electrode. The first plate is placed between the upper electrode and the lower electrode, and the first plate includes a plurality of first voids. The second plate is placed between the first plate and the lower electrode, and the second plate includes a plurality of second voids. The high frequency power is provided by the upper electrode and the lower electrode in the vacuum chamber, and the plasma is generated between the third plate and the upper electrode. The plasma is filtered by the third void, the first void, and the second void.
    Type: Grant
    Filed: October 17, 2012
    Date of Patent: March 20, 2018
    Assignee: CHANG GUNG UNIVERSITY
    Inventors: Chi-Hsien Huang, Chao-Sung Lai, Chien Chou, Chu-Fa Chan
  • Plasma processing device
    Publication number: 20140060740
    Abstract: The invention provides a plasma processing device, wherein the upper electrode and the lower electrode are in the vacuum chamber. The chip is placed in the lower electrode. The first plate is placed between the upper electrode and the lower electrode, and the first plate includes a plurality of first voids. The second plate is placed between the first plate and the lower electrode, and the second plate includes a plurality of second voids. The high frequency power is provided by the upper electrode and the lower electrode in the vacuum chamber, and the plasma is generated between the third plate and the upper electrode. The plasma is filtered by the third void, the first void, and the second void.
    Type: Application
    Filed: October 17, 2012
    Publication date: March 6, 2014
    Applicant: Chang Gung University
    Inventors: Chi-Hsien HUANG, Chao-Sung LAI, Chien CHOU, Chu-Fa CHAN