Abstract: A semiconductor manufacturing execution system (MES) is disclosed, including a memory module, a comparing module, and an outputting module. The memory module stores a basic database and a recipe distribution management (RDM) database. The basic database includes multiple basic records, and the RDM database includes multiple RDM records. The comparing module compares operation data, received from a manufacturing machine, to each of the RDM records, and secondarily to each of the basic records, to determine whether the operation data matches at least one of the RDM and basic records. The outputting module outputs a limiting signal to the manufacturing machine if the operation data matches at least one of the RDM records. The limiting signal prevents the manufacturing machine from executing a process corresponding to the operation data.

Abstract: A semiconductor manufacturing execution system (MES) is disclosed, including a memory module, a comparing module, and an outputting module. The memory module stores a basic database and a recipe distribution management (RDM) database. The basic database includes multiple basic records, and the RDM database includes multiple RDM records. The comparing module compares operation data, received from a manufacturing machine, to each of the RDM records, and secondarily to each of the basic records, to determine whether the operation data matches at least one of the RDM and basic records. The outputting module outputs a limiting signal to the manufacturing machine if the operation data matches at least one of the RDM records. The limiting signal prevents the manufacturing machine from executing a process corresponding to the operation data.

Abstract: A manufacturing execution system (MES) is disclosed including a first database and a second database. The first database (e.g., a basic database) stores a first set of records, wherein each of the first set of records includes information regarding a routine operation to be performed on at least one semiconductor wafer when the at least one semiconductor wafer is positioned within a process tool. The second database (e.g., a special engineer requirement, or SER, database) stores a second set of records, wherein each of the second set of records includes information regarding a special operation to be performed on the at least one semiconductor wafer when positioned within the process tool. A method is also described, which may be embodied within the MES. The method includes receiving operation data from the process tool, wherein the operation data includes information regarding a selected operation (e.g., a user-selected recipe) to be performed within the process tool.