Patents by Inventor Chu-Ting CHANG

Chu-Ting CHANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF CONTROLLING CHEMICAL CONCENTRATION IN ELECTROLYTE
    Publication number: 20230265578
    Abstract: A method of controlling chemical concentration in electrolyte includes measuring the chemical concentration in the electrolyte in a tank, wherein an end of an exhaust pipe is connected to a top of the tank; determining, by a valve moved along a top surface of the tank, a vapor flux through the exhaust pipe based on the measured chemical concentration; rotating, by using a motor connected to a ball screw connected to the valve, the ball screw to move a gate of the valve based on the determined vapor flux; electroplating, using the electrolyte provided by the tank, wafers respectively in a plurality of electroplating cells that are connected to the tank; and recycling the electrolyte to the tank.
    Type: Application
    Filed: April 28, 2023
    Publication date: August 24, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yung-Chang HUANG, You-Fu CHEN, Yu-Chi TSAI, Chu-Ting CHANG
  • Method of controlling chemical concentration in electrolyte
    Patent number: 11668019
    Abstract: A method of controlling chemical concentration in electrolyte includes measuring a chemical concentration in an electrolyte, wherein the electrolyte is contained in a tank; and increasing a vapor flux through an exhaust pipe connected to the tank when the measured chemical concentration is lower than a control lower limit value.
    Type: Grant
    Filed: March 21, 2022
    Date of Patent: June 6, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yung-Chang Huang, You-Fu Chen, Yu-Chi Tsai, Chu-Ting Chang
  • METHOD OF CONTROLLING CHEMICAL CONCENTRATION IN ELECTROLYTE
    Publication number: 20230002926
    Abstract: A method of controlling chemical concentration in electrolyte includes measuring a chemical concentration in an electrolyte, wherein the electrolyte is contained in a tank; and increasing a vapor flux through an exhaust pipe connected to the tank when the measured chemical concentration is lower than a control lower limit value.
    Type: Application
    Filed: March 21, 2022
    Publication date: January 5, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yung-Chang HUANG, You-Fu CHEN, Yu-Chi TSAI, Chu-Ting CHANG
  • Method of controlling chemical concentration in electrolyte and semiconductor apparatus
    Patent number: 11280021
    Abstract: A method of controlling chemical concentration in electrolyte includes measuring a chemical concentration in an electrolyte, wherein the electrolyte is contained in a tank; and increasing a vapor flux through an exhaust pipe connected to the tank when the measured chemical concentration is lower than a control lower limit value.
    Type: Grant
    Filed: February 15, 2019
    Date of Patent: March 22, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yung-Chang Huang, You-Fu Chen, Yu-Chi Tsai, Chu-Ting Chang
  • METHOD OF CONTROLLING CHEMICAL CONCENTRATION IN ELECTROLYTE AND SEMICONDUCTOR APPARATUS
    Publication number: 20190323142
    Abstract: A method of controlling chemical concentration in electrolyte includes measuring a chemical concentration in an electrolyte, wherein the electrolyte is contained in a tank; and increasing a vapor flux through an exhaust pipe connected to the tank when the measured chemical concentration is lower than a control lower limit value.
    Type: Application
    Filed: February 15, 2019
    Publication date: October 24, 2019
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yung-Chang HUANG, You-Fu CHEN, Yu-Chi TSAI, Chu-Ting CHANG