Abstract: This disclosure provides systems, methods and apparatus for controlling a mechanical layer. In one aspect, an electromechanical systems device includes a substrate and a mechanical layer positioned over the substrate to define a gap. The mechanical layer is movable in the gap between an actuated position and a relaxed position, and includes a mirror layer, a cap layer, and a dielectric layer disposed between the mirror layer and the cap layer. The mechanical layer is configured to have a curvature in a direction away from the substrate when the mechanical layer is in the relaxed position. In some implementations, the mechanical layer can be formed to have a positive stress gradient directed toward the substrate that can direct the curvature of the mechanical layer upward when the sacrificial layer is removed.

Abstract: A surface plasmon enhanced light-emitting diode includes, from bottom to top, a substrate, an n-type semiconductor layer, a light-emitting layer, a p-type semiconductor layer, and a plurality of metal filler elements. The p-type semiconductor layer includes upper and lower surfaces, and the upper surface is recessed downward to form a plurality of spaced apart recesses for receiving the metal filler elements, respectively.

Abstract: This disclosure provides systems, methods and apparatuses for supporting a mechanical layer. In one aspect, an electromechanical systems device includes a substrate, a mechanical layer, and a post positioned on the substrate for supporting the mechanical layer. The mechanical layer is spaced from the substrate and defines one side of a gap between the mechanical layer and the substrate, and the mechanical layer is movable in the gap between an actuated position and a relaxed position. The post includes a wing portion in contact with a portion of the mechanical layer, the wing portion positioned between the gap and the mechanical layer. The wing portion can include a plurality of layers configured to control the curvature of the mechanical layer.

Abstract: A surface plasmon enhanced light-emitting diode includes, from bottom to top, a substrate, an n-type semiconductor layer, a light-emitting layer, a p-type semiconductor layer, and a plurality of metal filler elements. The p-type semiconductor layer includes upper and lower surfaces, and the upper surface is recessed downward to form a plurality of spaced apart recesses for receiving the metal filler elements, respectively.

Abstract: A micro/nano-pattern film contact transfer process is described, comprising: providing a mold, wherein an imprinting pattern is set in a first surface of the mold; forming a release layer on the first surface of the mold and a transfer material layer on the release layer; providing a substrate; placing the mold on a first surface of the substrate, wherein the first surface of the mold is opposite to the first surface of the substrate; applying a pre-pressed force on the substrate from a second surface opposite to the first surface of the substrate; providing a heating source to heat the transfer material layer to produce an adhesion effect between a portion of the transfer material layer contacting with the first surface of the substrate and the substrate; and removing the mold, wherein the contacting portion of the transfer material layer is transferred onto the first surface of the substrate.

Abstract: A pixel structure is provided. A scan line is disposed on a substrate and a gate insulating layer is disposed thereon. A semiconductor layer is disposed on the gate insulating layer and a data line, a source electrode and a drain electrode are disposed thereon. The source electrode and the drain electrode are located above the scan line. The source electrode is connected to the data line. A semiconductor layer exposed by the source electrode and the drain electrode is a channel region. The source electrode protrudes from the channel region along the length direction of the channel region. A passivation layer covers the substrate. A pixel electrode is disposed on the passivation layer and electrically connected to the drain electrode via a contact opening of the passivation layer.

Abstract: An optical carrier drop/add transmission system and method for adding a signal to multiplexed input optical signals conveyed by an optical multiplex input line. The multiplexed input optical signals are demultiplexed to provide isolated input optical signals to an optical switch matrix comprising switches in an array of lines and column, the isolated input optical signals being inputted in a direction parallel to a line of switches in the optical switch matrix. The added optical signal is input in a direction parallel to a column in the optical switch matrix. An output line is selected and the switch that is on the column on which the added optical signal is inputted and on the selected output line is switched.

Abstract: An optical carrier drop/add transmission system and method for adding a signal to multiplexed input optical signals conveyed by an optical multiplex input line. The multiplexed input optical signals are demultiplexed to provide isolated input optical signals to an optical switch matrix comprising switches in an array of lines and columns, the isolated input optical signals being inputted in a direction parallel to a line of switches in the optical switch matrix. The added optical signal is input in a direction parallel to a column in the optical switch matrix. An output line is selected and the switch that is on the column on which the added optical signal is inputted and on the selected output line is switched.

Abstract: An optical network element using arrays of mirrors in an optical switch. A lens system is placed in between the mirror arrays and optical signals are passed through the lens system in an off-axis manner in order to increase switching capacity so that larger arrays of mirrors can be used, shorten the optical path through the switch or a combination of both.

Abstract: The invention provides methods and systems for micro-machined tunable delay lines. Particularly, the micro-machined tunable delay lines of the present invention utilize adjustable micro-machined micro-mirrors to alter the path length traversed by an optical signal.

Abstract: Methods and systems for controlling the state of polarization of an optical beam using micro-machined devices are provided. By cascading a number of simple polarization state rotators integrated on a number of silicon substrates, the state of polarization of an optical beam can be effectively manipulated to any point on the Poincaré sphere.

Abstract: An integrated polarization sensing apparatus and method uses a self-homodyne detection scheme to provide required sensitivity for numerous applications, such as glucose concentration monitoring, without the need for expensive, bulky components. The detection scheme is implemented by splitting a polarized laser beam with a polarization beam splitter into a P wave component and an S wave component, phase modulating the P wave component and recombining the two components. The polarization of the combined optical beam is then rotated slightly by the variable to be monitored, such as by passing the beam through a glucose solution. Finally, the beam is passed onto a photodetector that generates a signal that is proportional to the polarization rotation angle. This device has the advantage of employing optical components, including polarizing beam splitters, phase modulators and lenses, that can all be fabricated on a single silicon chip using MEMS technology so that the device can be made compact and inexpensive.