Abstract: A method for drying a wafer includes a cleaning step, a liquid replacing step, and a drying step. In the cleaning step, a workpiece located in a process chamber is cleaned with a cleaning solution. In the liquid replacing step, a drying agent in gas phase is compressed to convert into liquid phase, and the drying agent in liquid phase is introduced to the process chamber to replace the cleaning solution. In the drying step, the cleaning solution is discharged out of the process chamber, and then the drying agent is converted from liquid phase back to gas phase and is discharged out of the process chamber.

Abstract: A method for drying a wafer at room temperature includes a cleaning step, a reacting step and a pressure releasing step. The cleaning step includes putting a processing workpiece into a cleaning solvent. The reacting step includes putting the processing workpiece along with the cleaning solvent into a reaction chamber, implanting a supercritical fluid into the reaction chamber, and increasing a pressure of the reaction chamber to dissolve the cleaning solvent in the supercritical fluid. A critical temperature of the supercritical fluid is below room temperature. The pressure releasing step includes releasing the pressure of the reaction chamber and discharging the supercritical fluid together with the cleaning solvent out of the reaction chamber, after completely dissolving the cleaning solvent in the supercritical fluid.

Abstract: A data de-identification method, a data de-identification apparatus and a non-transitory computer readable storage medium executing the same are provided. Original data including an identification field, a condition field, and a record field is obtained. An event condition is obtained according to the condition field. From the original data, a plurality of event fragment sequences corresponding to each of a plurality of identification data and corresponding to the event condition are obtained according to the plurality of identification data in the identification field and the event condition. Sequence data is obtained according to the plurality of identification data and the plurality of event fragment sequences corresponding to each of the identification data. De-identification data is obtained by adjusting the sequence data.

Abstract: A data de-identification method, a data de-identification apparatus and a non-transitory computer readable storage medium executing the same are provided. Original data including an identification field, a condition field, and a record field is obtained. An event condition is obtained according to the condition field. From the original data, a plurality of event fragment sequences corresponding to each of a plurality of identification data and corresponding to the event condition are obtained according to the plurality of identification data in the identification field and the event condition. Sequence data is obtained according to the plurality of identification data and the plurality of event fragment sequences corresponding to each of the identification data. De-identification data is obtained by adjusting the sequence data.