Patents by Inventor Chuang-Hui Kuo

Chuang-Hui Kuo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for improving resolution limits of a stepper
    Publication number: 20030071983
    Abstract: A method for improving the resolution limits of a stepper is described. The region between the mask and the projection lens of the stepper is filled with a transparent material, wherein the reflection index of the transparent material is greater than one. Since the reflection index of the transparent material is greater than one, the diffracted angle of the diffracted light, formed after the parallel light from the light source passes through the mask, is reduced. A majority of the diffracted light can thus pass through the projection lens to improve the resolution limits of the stepper.
    Type: Application
    Filed: November 20, 2001
    Publication date: April 17, 2003
    Inventors: Chi-Yuan Hung, Ching-Yu Chang, I-Pien Wu, Chuang-Hui Kuo