Abstract: A miniature, micrometer-accuracy, three-dimensional (3D) position-to-optical displacement sensor that has at least one extrinsic Fabry-Perot interferometer (EFPI) in Z direction and a series of plasmonic metasurface resonators with distinctive wavelength-selective characteristics in X and Y directions. The interferometer comprises at least one single mode optic fiber for light propagation, and a substrate mirror to create a light interference fringe as a function of distance between the mirror and the distal end of the optic fiber. Each plasmonic resonator is capable of modifying the substrate mirror and comprises an array of multiple unit nanostructure unit cells that are arranged in a two-dimensional (2D) square lattice or array in the X-Y plane. The nanostructure unit cells are preferably inscribed in the top layer of a three-layer thin film via the focused ion beam (FIB).

Abstract: A miniature, micrometer-accuracy, three-dimensional (3D) position-to-optical displacement sensor that has at least one extrinsic Fabry-Perot interferometer (EFPI) in Z direction and a series of plasmonic metasurface resonators with distinctive wavelength-selective characteristics in X and Y directions. The interferometer comprises at least one single mode optic fiber for light propagation, and a substrate mirror to create a light interference fringe as a function of distance between the mirror and the distal end of the optic fiber. Each plasmonic resonator is capable of modifying the substrate mirror and comprises an array of multiple unit nanostructure unit cells that are arranged in a two-dimensional (2D) square lattice or array in the X-Y plane. The nanostructure unit cells are preferably inscribed in the top layer of a three-layer thin film via the focused ion beam (FIB).