Patents by Inventor Chuck Hedberg

Chuck Hedberg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Use of pulsed grounding source in a plasma reactor
    Publication number: 20060194437
    Abstract: A method for grounding a semiconductor substrate pedestal during a portion of a high voltage power bias oscillation cycle to reduce or eliminate the detrimental effects of feature charging during the operation of a plasma reactor.
    Type: Application
    Filed: April 18, 2006
    Publication date: August 31, 2006
    Inventors: Chuck Hedberg, Kevin Donohoe