Abstract: This patent discloses a modular environmental control system for small cleanroom enclosures ("mini-enclosures"). Small environmental control units ("ECUs") are mounted on top of individual mini-enclosures, as near as possible to the process tool within the enclosure. Each ECU has the capability of controlling temperature, humidity, and airflow rate delivered into the enclosure. Temperature is adjusted by first cooling the air inside the ECU followed by reheating it to a selected temperature. The cooling capability is not generated by individual ECUs. Instead, a remote fluid cooling unit supplies chilled fluid to each ECU, which is circulated internally to cool the air. The same remote unit services different ECUs at the same time.

Abstract: The present invention is a humidifier that provides uniformly controlled generation of water vapor into an air stream. Steel wool is placed into a heating section of a humidifier water reservoir, where vapor is produced, to create an even distribution of vapor exiting the humidifier. A perforated plate is horizontally inserted into the heating section above the steel wool, thereby holding it in place and aiding in the even distribution of vapor from the humidifier.