Abstract: In one sense, the invention relates to a novel device for handling of substrates. The device has movable support arms configured to safely handle substrates, as well as gripping members for holding the substrate in place. The arms support the substrate, and the gripping members grab the substrate along its edges. The support arms then move away from the substrate. In this manner, the substrate is held in place by the grippers, along its edges. Because the support arms are moved away from the substrate surfaces, both sides of the substrate are thus exposed simultaneously, facilitating speed in processes such as inspection, and thus yielding greater process efficiency.