Patents by Inventor Chuen Yeh

Chuen Yeh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240339327
    Abstract: A wet etching chemistry to selectively remove a polymer residue on an opening embedded in a low-k dielectric layer and an underlying stop layer in a process of forming an interconnect structure is provided. The wet etching chemistry includes: two type of organic solvents, wherein a concentration of the two type of organic solvents is greater than or equal to 70%; an Alkali source amine, at least comprising a tertiary amine; an inhibitor; and water. In some embodiment, the wet etching chemistry is free of a peroxide to avoid damage to the WdC hard mask.
    Type: Application
    Filed: June 20, 2024
    Publication date: October 10, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Meng-Hsien Li, Ying-Chuen Wang, Chieh-Yi Shen, Li-Min Chen, Ming-Hsi Yeh, Kuo-Bin Huang
  • Patent number: 12046476
    Abstract: A wet etching chemistry to selectively remove a polymer residue on an opening embedded in a low-k dielectric layer and an underlying stop layer in a process of forming an interconnect structure is provided. The wet etching chemistry includes: two type of organic solvents, wherein a concentration of the two type of organic solvents is greater than or equal to 70%; an Alkali source amine, at least comprising a tertiary amine; an inhibitor; and water. In some embodiment, the wet etching chemistry is free of a peroxide to avoid damage to the WdC hard mask.
    Type: Grant
    Filed: March 25, 2022
    Date of Patent: July 23, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Meng-Hsien Li, Ying-Chuen Wang, Chieh-Yi Shen, Li-Min Chen, Ming-Hsi Yeh, Kuo-Bin Huang
  • Publication number: 20070170096
    Abstract: Mesoporous aluminum oxides with high surface areas have been synthesized using inexpensive, small organic templating agents instead of surfactants. Option-ally, some of the aluminum can be framework-substituted by one or more other elements. The material has high thermal stability and possesses a three-dimensionally randomly connected mesopore network with continuously tunable pore sizes. This material can be used as catalysts for dehydration, hydrotreating, hydrogenation, catalytic reforming, steam reforming, amination, Fischer-Tropsch synthesis and Diels-Alder synthesis, etc.
    Type: Application
    Filed: March 21, 2007
    Publication date: July 26, 2007
    Inventors: Zhiping Shan, Jacobus Jansen, Chuen Yeh, Philip Angevine, Thomas Maschmeyer
  • Publication number: 20070128643
    Abstract: The present invention is related to a novel method for assaying high quantity of nucleic acid fragments, by using the single-stranded anchor nucleic acid probe with biotin and this single-stranded anchor nucleic acid hereto form double-stranded nucleic acid with the target nucleic acid fragment. To detect the target fragment does not need electrophoresis or nucleic acid sequencing but needs the antibody against double-stranded nucleic acid or the specific single-stranded reporter nucleic acid labeled with a fluorescent dye. The present invention is also related to a kit of assaying high quantity of nucleic acid fragments. A container (the multiwell plate) coating the avidin family molecule is a tool for connecting with the biotinylated target nucleic acid and subjected to the antibody reaction or fluorescence detection.
    Type: Application
    Filed: November 28, 2006
    Publication date: June 7, 2007
    Inventor: Yang-Chuen Yeh
  • Publication number: 20060264318
    Abstract: A catalytic material includes microporous zeolites supported on a mesoporous inorganic oxide support. The microporous zeolite can include zeolite Beta, zeolite Y (including “ultra stable Y”—USY), mordenite, Zeolite L, ZSM-5, ZSM-11, ZSM-12, ZSM-20, Theta-1, ZSM-23, ZSM-34, ZSM-35, ZSM-48, SSZ-32, PSH-3, MCM-22, MCM-49, MCM-56, ITQ-1, ITQ-2, ITQ-4, ITQ-21, SAPO-5, SAPO-11, SAPO-37, Breck-6, ALPO4-5, etc. The mesoporous inorganic oxide can be e.g., silica or silicate. The catalytic material can be further modified by introducing some metals e.g. aluminum, titanium, molybdenum, nickel, cobalt, iron, tungsten, palladium and platinum. It can be used as catalysts for acylation, alkylation, dimerization, oligomerization, polymerization, hydrogenation, dehydrogenation, aromatization, isomerization, hydrotreating, catalytic cracking and hydrocracking reactions.
    Type: Application
    Filed: June 2, 2006
    Publication date: November 23, 2006
    Inventors: Zhiping Shan, Peter Waller, Bowden Maingay, Philip Angevine, Jacobus Jansen, Chuen Yeh, Thomas Maschmeyer, Frits Dautzenberg, Leonardo Marchese, Heloise Pastore
  • Publication number: 20060128555
    Abstract: A catalytic material includes microporous zeolites supported on a mesoporous inorganic oxide support. The microporous zeolite can include zeolite Beta, zeolite Y (including “ultra stable Y”—USY), mordenite, Zeolite L, ZSM-5, ZSM-11, ZSM-12, ZSM-20, Theta-1, ZSM-23, ZSM-34, ZSM-35, ZSM-48, SSZ-32, PSH-3, MCM-22, MCM-49, MCM-56, ITQ-1, ITQ-2, ITQ-4, ITQ-21, SAPO-5, SAPO-11, SAPO-37, Breck-6, ALPO4-5, etc. The mesoporous inorganic oxide can be e.g., silica or silicate. The catalytic material can be further modified by introducing some metals e.g. aluminum, titanium, molybdenum, nickel, cobalt, iron, tungsten, palladium and platinum. It can be used as catalysts for acylation, alkylation, dimerization, oligomerization, polymerization, hydrogenation, dehydrogenation, aromatization, isomerization, hydrotreating, catalytic cracking and hydrocracking reactions.
    Type: Application
    Filed: February 8, 2006
    Publication date: June 15, 2006
    Inventors: Zhiping Shan, Peter Wilhelm, Bowden Maingay, Philip Angevine, Jacobus Jansen, Chuen Yeh, Thomas Maschmeyer, Frits Dautzenberg, Leonardo Marchese, Heloise Oliveira Pastore
  • Publication number: 20060052234
    Abstract: A process for treating organic compounds includes providing a composition which includes a substantially mesoporous structure of refractory oxide containing at least 97% by volume of pores having a pore size ranging from about 15 ? to about 30 ? and having a micropore volume of at least about 0.01 cc/g, wherein the mesoporous structure has incorporated therewith at least about 0.02% by weight of at least one catalytically and/or chemically active heteroatom selected from the group consisting of Al, Ti, V, Cr, Zn, Fe, Sn, Mo, Ga, Ni, Co, In, Zr, Mn, Cu, Mg, Pd, Pt and W, and the catalyst has an X-ray diffraction pattern with one peak at 0.3° to about 3.5° at 2 theta (?). The catalyst is contacted with an organic feed under reaction conditions wherein the treating process is selected from alkylation, acylation, oligomerization, selective oxidation, hydrotreating, isomerization, demetalation, catalytic dewaxing, hydroxylation, hydrogenation, ammoximation, isomerization, dehydrogenation, cracking and adsorption.
    Type: Application
    Filed: August 5, 2005
    Publication date: March 9, 2006
    Inventors: Zhiping Shan, Jacobus Jansen, Chuen Yeh, Philip Angevine, Thomas Maschmeyer, Mohamed Hamdy
  • Publication number: 20050234283
    Abstract: A catalyst composition includes an oxygen compound of an element selected from Group IVB or Group IVA of the Periodic Table of the Elements; an oxygen compound of an element selected from Group VIB or Group VIA of the Periodic Table of the Elements; and at least about 1% by weight based upon total catalyst weight of fumed silica particles. The catalyst composition is advantageously employed in hydrocarbon conversion processes such as isomerization.
    Type: Application
    Filed: April 14, 2004
    Publication date: October 20, 2005
    Inventors: Jinsuo Xu, Chuen Yeh, Philip Angevine
  • Publication number: 20050201920
    Abstract: A process for treating organic compounds includes providing a composition which includes a substantially mesoporous structure of silica containing at least 97% by volume of pores having a pore size ranging from about 15 ? to about 30 ? and having a micropore volume of at least about 0.01 cc/g, wherein the mesoporous structure has incorporated therewith at least about 0.02% by weight of at least one catalytically and/or chemically active heteroatom selected from the group consisting of Al, Ti, V, Cr, Zn, Fe, Sn, Mo, Ga, Ni, Co, In, Zr, Mn, Cu, Mg, Pd, Pt and W, and the catalyst has an X-ray diffraction pattern with one peak at 0.3° to about 3.5° at 2?. The catalyst is contacted with an organic feed under reaction conditions wherein the treating process is selected from alkylation, acylation, oligomerization, selective oxidation, hydrotreating, isomerization, demetalation, catalytic dewaxing, hydroxylation, hydrogenation, ammoximation, isomerization, dehydrogenation, cracking and adsorption.
    Type: Application
    Filed: April 8, 2005
    Publication date: September 15, 2005
    Inventors: Zhiping Shan, Jacobus Jansen, Chuen Yeh, Philip Angevine, Thomas Maschmeyer, Mohamed Hamdy
  • Publication number: 20050197499
    Abstract: An integrated process combines olefin epoxidation with production of cyclohexanone and cyclohexanol for nylon. Cyclohexanone and cyclohexanol normally produced by the oxidation of cyclohexane, in which cyclohexyl hydroperoxide is generated and is removed or decomposed down stream. However, this invention utilizes the intermediate of cyclohexyl hydroperoxide as an oxidant for the olefin epoxidation and meanwhile generates a valuable product.
    Type: Application
    Filed: March 8, 2004
    Publication date: September 8, 2005
    Inventors: Zhiping Shan, Chuen Yeh, Philip Angevine, Frits Dautzenberg, Jacobus Jansen
  • Publication number: 20050194289
    Abstract: A method for making a zeolite includes providing a reaction mixture containing mixed inorganic oxides and an organic templating agent, heating the reaction mixture, removing the templating agent at a temperature of no greater than 550° C. and under conditions such that the resulting zeolite is has an AAI of at least 1.2. The zeolite is preferably zeolite beta, TEA-mordenite or TEA-ZSM-12.
    Type: Application
    Filed: December 28, 2004
    Publication date: September 8, 2005
    Inventors: Rudolf Overbeek, Nelleke Puil, Chuen Yeh, Lawrence Murrell, Yun-Feng Chang, Philip Angevine, Johannes Koegler
  • Publication number: 20050164870
    Abstract: A method for making a mesoporous or combined mesoporous/microporous inorganic oxide includes reacting a source of inorganic oxide with a complexing agent at a complexation temperature to provide a complex; decomposing the complex to provide a porous material precursor having an inorganic oxide framework containing at least some organic pore-forming agent; and removing the organic pore forming agent from the inorganic oxide framework by solvent extraction and/or calcination.
    Type: Application
    Filed: January 26, 2004
    Publication date: July 28, 2005
    Inventors: Zhiping Shan, Xintao Gao, Chuen Yeh, Philip Angevine, Martin Kraus
  • Publication number: 20050154243
    Abstract: An aromatic alkylation process includes contacting an aromatic compound with an alkylating agent in the presence of a zeolite beta in a reaction zone under alkylation reaction conditions, wherein said zeolite beta is a high performance zeolite beta possessing a ratio of strong acid sites/weak acid sites greater than 1. The high performance zeolite beta is superior to conventional zeolite beta in the aromatics alkylation reaction, such as benzene alkylation with ethylene for ethylbenzene production, and benzene alkylation with propylene for cumene production.
    Type: Application
    Filed: December 1, 2004
    Publication date: July 14, 2005
    Inventors: Chuen Yeh, Jinsuo Xu, Philip Angevine
  • Publication number: 20050013773
    Abstract: A catalytic material includes a microporous zeolite supported on a mesoporous inorganic oxide support. The microporous zeolite can include zeolite beta, zeolite Y or ZSM-5. The mesoporous inorganic oxide can be, e.g., silica or alumina, and can optionally include other metals. Methods for making and using the catalytic material are described herein.
    Type: Application
    Filed: June 24, 2004
    Publication date: January 20, 2005
    Inventors: Zhiping Shan, Jacobus Jansen, Chuen Yeh, Johannes Koegler, Thomas Maschmeyer