Patents by Inventor Chuhei Oshima

Chuhei Oshima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion source and electron source having single-atom termination structure, tip having single-atom termination structure, gas field ion source, focused ion beam apparatus, electron source, electron microscope, mask repair apparatus, and method of manufacturing tip having single-atom termination structure
    Patent number: 10529531
    Abstract: Provided is a tip capable of repeatedly regenerating a single-atom termination structure in which a distal end is formed of only one atom. A tip (1) having a single-atom termination structure includes: a thin line member (2) made of a first metal material; a protruding portion (4) made of a second metal material, which is formed at least in a distal end portion (2a) of the thin line member (2), and has a distal end terminated with only one atom; and a supply portion (5) made of the second metal material to be supplied to the protruding portion (4), which is formed in the vicinity of the distal end portion (2a) of the thin line member (2).
    Type: Grant
    Filed: November 28, 2018
    Date of Patent: January 7, 2020
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Chuhei Oshima, Masahiko Tomitori, Anto Yasaka, Tatsuya Shimoda
  • ION SOURCE AND ELECTRON SOURCE HAVING SINGLE-ATOM TERMINATION STRUCTURE, TIP HAVING SINGLE-ATOM TERMINATION STRUCTURE, GAS FIELD ION SOURCE, FOCUSED ION BEAM APPARATUS, ELECTRON SOURCE, ELECTRON MICROSCOPE, MASK REPAIR APPARATUS, AND METHOD OF MANUFACTURING TIP HAVING SINGLE-ATOM TERMINATION STRUCTURE
    Publication number: 20190164719
    Abstract: Provided is a tip capable of repeatedly regenerating a single-atom termination structure in which a distal end is formed of only one atom. A tip (1) having a single-atom termination structure includes: a thin line member (2) made of a first metal material; a protruding portion (4) made of a second metal material, which is formed at least in a distal end portion (2a) of the thin line member (2), and has a distal end terminated with only one atom; and a supply portion (5) made of the second metal material to be supplied to the protruding portion (4), which is formed in the vicinity of the distal end portion (2a) of the thin line member (2).
    Type: Application
    Filed: November 28, 2018
    Publication date: May 30, 2019
    Inventors: Chuhei OSHIMA, Masahiko TOMITORI, Anto YASAKA, Tatsuya SHIMODA
  • Field emission type electron gun
    Patent number: 4910442
    Abstract: A field emission type electron gun comprises a cathode, an anode placed opposing the cathode, a filament placed obliquely above the anode in a space between the cathode and anode to heat the anode, a control electrode and a vacuum container housing the cathode, the anode the control electrode and the filament. The anode has an elongated body with a through hole at its center, the control electrode is provided near the anode, and means for rendering the electric potential of the control electrode to be negative to the electric potential of the anode is provided to concentrate an electron beam to the top end of the anode.
    Type: Grant
    Filed: October 27, 1988
    Date of Patent: March 20, 1990
    Assignee: National Institute for Researches in Inorganic Materials
    Inventors: Yoshio Ishizawa, Chuhei Oshima, Susumu Aoki
  • Field emission type electron gun
    Patent number: 4596942
    Abstract: A field emission type electron gun comprises a cathode, a plurality of anodes opposing in series to the cathode and a filament for heating the anodes, all being contained in a vacuum tube. The filament is placed immediately before a first anode directly opposing the cathode in a symmetrical manner so as to serve both as a gas expelling member and as an anode.
    Type: Grant
    Filed: February 14, 1984
    Date of Patent: June 24, 1986
    Assignee: National Institute for Researches in Inorganic Materials
    Inventors: Chuhei Oshima, Yoshio Ishizawa