Patents by Inventor CHUL GOO KIM

CHUL GOO KIM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS FOR TREATING SUBSTRATE
    Publication number: 20230033534
    Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a treating bath for liquid treating a plurality of substrates and having an accommodation space for accommodating a treating liquid; and a posture changing member for changing a posture of a substrate which is immersed in the treating liquid from a vertical posture to a horizontal posture.
    Type: Application
    Filed: July 28, 2022
    Publication date: February 2, 2023
    Applicant: SEMES CO., LTD.
    Inventors: JUN YOUNG CHOI, KYU HWAN CHANG, CHUL GOO KIM, JUNG BONG CHOI, YOUNG IL LEE
  • SUPPORT UNIT AND SUBSTRATE TREATING APPARATUS
    Publication number: 20220319905
    Abstract: Disclosed is a support unit. The support unit that supports a substrate may include a chuck stage that is rotatable, a heating member disposed above the chuck stage and that heats the substrate supported by the support unit, a power source that applies electric power to the heating member, a window disposed above the chuck stage and defining an interior space, in which the heating member is disposed, and an interlock module that selectively cuts off the electric power applied to the heating member.
    Type: Application
    Filed: March 25, 2022
    Publication date: October 6, 2022
    Applicant: SEMES CO., LTD.
    Inventors: Soo Han SONG, Chul Goo KIM, Jung Bong CHOI, Kang Seop YUN
  • SUPPORTING UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME
    Publication number: 20220181168
    Abstract: The inventive concept provides a substrate support unit comprising a chuck supporting and rotating a substrate; and a lamp unit provided below the substrate to heat the substrate, wherein the lamp unit comprises a first lamp having a reflective layer on the surface thereof, to block and/or reflect a light which is emitted from the first lamp but not directed to the substrate to direct the light to the substrate.
    Type: Application
    Filed: December 7, 2021
    Publication date: June 9, 2022
    Applicant: SEMES CO., LTD.
    Inventors: KANG SEOP YUN, CHUL GOO KIM, JUNG BONG CHOI, SOO HAN SONG
  • SUPPORT UNIT AND APPARATUS FOR TREATING SUBSTRATE
    Publication number: 20220157645
    Abstract: Provided is a support unit for supporting a substrate, the support unit including: a heating member configured to transmit thermal energy to a supported substrate; a reflective plate disposed under the heating member and configured to reflect thermal energy generated by the heating member to the substrate; a cooling plate disposed under the reflective plate and formed with a cooling flow path in which a cooling fluid flows; and a gas supply line configured to supply gas to a space between the reflective plate and the cooling plate.
    Type: Application
    Filed: November 19, 2021
    Publication date: May 19, 2022
    Inventors: SOO HAN SONG, CHUL GOO KIM, JUNG BONG CHOI, CHEOL-YONG SHIN, JAE-YOUL KIM