Abstract: The present disclosure relates to a thin film forming method, and more particularly, to a thin film forming method for forming a gallium nitride thin film. In accordance with an exemplary embodiment, a thin film forming method includes: loading a substrate into a process space of a chamber; and forming a gallium nitride thin film on the substrate, and the forming of the gallium nitride thin film includes: supplying a source gas containing gallium onto the substrate; supplying a reactant gas containing nitrogen onto the substrate; and activating and supplying a post-treatment gas containing hydrogen onto the substrate.

Abstract: A lung phantom unit for radiotherapy according to an embodiment of the present disclosure may arrange, at a location not affected by a magnetic field, a phantom driving cylinder and a driving device which may move a lung mimic and a tumor mimic in a lung simulation block. The lung phantom unit may be used for general purpose even as a phantom for MRI-based and CT image-based radiotherapy. Since lung and tumor motions are implemented by air injection, it may be possible to precisely measure the motion and volume change of a lung according to subtle changes in air pressure so that customized radiotherapy suitable for a patient having various breathing patterns is possible.

Abstract: A ceramic heater includes a heating element, and the ceramic heater is characterized in that connecting portions connecting concentric circumferences of the heating element included in the ceramic heater are formed such that symmetrical axes of pairs of the connecting portions do not pass through a center of the heating element.

Abstract: A display device includes a display panel foldable about a folding axis, a window on the display panel, a protective film on the window, and a plurality of adhesive layers between the window and the protective film. The adhesive layers include a first adhesive layer on the window and a second adhesive layer on the first adhesive layer. The first adhesive layer includes a side chain crystalline polymer, and the second adhesive layer has a modulus smaller than a modulus of the first adhesive layer.

Abstract: The present invention relates to a ceramic heater and, more specifically, to a ceramic heater characterized in that connecting portions connecting concentric circumferences of a heating element included in the ceramic heater are formed such that the symmetrical axes of pairs of connecting portions do not pass through the center of the heating element. The present invention has the benefit of providing a ceramic heater in which the heating surface of a ceramic plate has improved temperature uniformity as a result of the reduction of a low temperature region of the heating element included in the ceramic heater. In addition, the present invention has the benefit of providing a ceramic heater in which the heating surface of a ceramic plate has improved temperature uniformity by only changing the design of the structure of the connecting portions connecting the concentric circumferences of the heating element without adding an additional device.