Abstract: An apparatus for treating a substrate includes a process chamber having a process space, a support unit that supports the substrate in the process space, a lift pin module having a lift pin that moves a consumable component on the support unit in an up/down direction, and a measurement unit that measures a degree of wear of the consumable component and has a light receiving member that receives light emitted in a horizontal direction.

Abstract: An apparatus for treating a substrate includes a process chamber having a process space, a support unit that supports the substrate in the process space, a lift pin module having a lift pin that moves a consumable component on the support unit in an up/down direction, and a measurement unit that measures a degree of wear of the consumable component and has a light receiving member that receives light emitted in a horizontal direction.

Abstract: The present invention relates to a method for the public utilization of housing, including the steps of: establishing a housing utilization platform wherein a housing utilization platform operated and managed by the utilization housing supplier is opened; disclosing and browsing utilized houses on the established housing utilization platform, allowing the utilization housing supplier to disclose the utilized house and the utilization housing consumer who signed up for membership to browse the disclosed utilized house; and signing a housing utilization contract, based on the results of browsing the utilized house, to conclude a housing utilization contract between a utilization housing supplier and a plurality of utilization housing consumers, respectively, thereby creating stable profit for the housing supplier and proving residential stability and the convenience of free housing relocation for the housing consumer.

Abstract: An apparatus for treating a substrate includes a process chamber having a process space, a support unit that supports the substrate in the process space, a lift pin module having a lift pin that moves a consumable component on the support unit in an up/down direction, and a measurement unit that measures a degree of wear of the consumable component and has a light receiving member that receives light emitted in a horizontal direction.

Abstract: A memory data path controller for a large-scale parallel processing computer system in which, when a network interface and bus interface request access to a single-port memory, a dual path controller dividedly stores memory access requests in network queue and bus queue. This allows a single-port DRAM to be used as a dual-port memory device. Further, the network queue and bus queue are multi-staged to store sequential memory requests and transmit reading/writing data of the network queue or bus queue to the DRAM memory.