Patents by Inventor Chun-Feng Shen

Chun-Feng Shen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion implantation apparatus and partical collection structure thereof
    Publication number: 20050133736
    Abstract: An ion implantation apparatus. An ion implantation chamber has a movable work piece support holding one or more work pieces and a connecting housing between the ion implantation chamber and an accelerator thereof. A plurality of collectors with saw-toothed protrusions are mounted on the interior surface of the ion implantation chamber and the housing, and grounded to fix contaminant particles moving within the ion implantation apparatus.
    Type: Application
    Filed: December 17, 2003
    Publication date: June 23, 2005
    Inventors: Otto Chen, Yao-Chia Yeh, Chun-Feng Shen, Chung-Tung Chen