Patents by Inventor Chun-Hsiung Peng

Chun-Hsiung Peng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240113221
    Abstract: A fin field effect transistor (FinFET) device structure is provided. The FinFET device structure includes a plurality of fin structures above a substrate, an isolation structure over the substrate and between the fin structures, and a gate structure formed over the fin structure. The FinFET device structure includes a source/drain (S/D) structure over the fin structure, and the S/D structure is adjacent to the gate structure. The FinFET device structure also includes a metal silicide layer over the S/D structure, and the metal silicide layer is in contact with the isolation structure.
    Type: Application
    Filed: November 28, 2023
    Publication date: April 4, 2024
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun-Hsiung TSAI, Shahaji B. MORE, Cheng-Yi PENG, Yu-Ming LIN, Kuo-Feng YU, Ziwei FANG
  • Patent number: 11942376
    Abstract: Methods of manufacturing a semiconductor structure are provided. One of the methods includes: receiving a substrate including a first conductive region of a first transistor and a second conductive region of a second transistor, wherein the first transistor and the second transistor have different conductive types; performing an amorphization on the first conductive region and the second conductive region; performing an implantation over the first conductive region of the first transistor; forming a contact material layer over the first conductive region and the second conductive region; performing a thermal anneal on the first conductive region and the second conductive region; and performing a laser anneal on the first conductive region and the second conductive region.
    Type: Grant
    Filed: August 8, 2022
    Date of Patent: March 26, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chun Hsiung Tsai, Cheng-Yi Peng, Ching-Hua Lee, Chung-Cheng Wu, Clement Hsingjen Wann
  • Patent number: 7709908
    Abstract: A high-voltage transistor device has a substrate, an isolation structure, a source, a gate, a drain, a plurality of doped regions, a plurality of ion wells, and a first dielectric layer disposed on the substrate. The high-voltage transistor device further has a first conductive layer and a plurality of first field plate rings. The first conductive layer is electrically connected to the drain and at least one of the first field plate rings.
    Type: Grant
    Filed: August 10, 2007
    Date of Patent: May 4, 2010
    Assignee: United Microelectronics Corp.
    Inventors: Chao-Yuan Su, Wei-Lun Hsu, Ching-Ming Lee, Chih-Jen Huang, Te-Yuan Wu, Chun-Hsiung Peng
  • Publication number: 20090111252
    Abstract: A method of fabricating a deep well region of a high voltage device is provided. The method includes designating a deep well region that includes a designated highly doped region and a designed scarcely doped region in a substrate. A mask layer, which covers a periphery of the designated deep well region, is formed over the substrate, wherein the mask layer includes a plurality of shielding parts to cover a portion of the designated scarcely doped region. Using the mask layer as an implantation mask, an ion implantation process is performed to implant dopants into the substrate exposed by the mask and to form a plurality of undoped regions in the designated scarcely doped region covered by the shielding parts. The dopants in the designated scarcely doped region are then induced to diffuse to the undoped regions.
    Type: Application
    Filed: October 30, 2007
    Publication date: April 30, 2009
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chih-Jen Huang, Ching-Ming Lee, Wei-Lun Hsu, Chao-Yuan Su, Chun-Hsiung Peng
  • Publication number: 20090039424
    Abstract: A high-voltage transistor device has a substrate, an isolation structure, a source, a gate, a drain, a plurality of doped regions, a plurality of ion wells, and a first dielectric layer disposed on the substrate. The high-voltage transistor device further has a first conductive layer and a plurality of first field plate rings. The first conductive layer is electrically connected to the drain and at least one of the first field plate rings.
    Type: Application
    Filed: August 10, 2007
    Publication date: February 12, 2009
    Inventors: Chao-Yuan Su, Wei-Lun Hsu, Ching-Ming Lee, Chih-Jen Huang, Te-Yuan Wu, Chun-Hsiung Peng
  • Publication number: 20070066062
    Abstract: A novel landing uniformity ring for an etch chamber is disclosed. The landing uniformity ring includes an annular ring body defining a ring opening and an increased-diameter inner flange extending inwardly from the ring body, into the ring opening. When mounted in a landing uniformity ring assembly, the inner flange is disposed at a horizontal gap distance with respect to the edge of the wafer which improves the flow efficiency of exhaust gases in the etch chamber. This prevents the accumulation of polymer residues on the assembly and reduces the incidence of particle-related defects in devices being fabricated on a wafer.
    Type: Application
    Filed: September 20, 2005
    Publication date: March 22, 2007
    Inventors: Te-Hsiang Liu, Chun-Hsiung Peng
  • Patent number: 6734511
    Abstract: A method and system for implementing a variable function circuit within a single semiconductor chip. The semiconductor chip can be configured as a single circuit that provides varying functions according to extrinsic conditions. The single circuit can be permitted to be switched between a particular function and a different particular function, thereby promoting a decreased complexity in circuit design and a decrease in physical dimensions necessary to manufacture the semiconductor chip. Additionally, at least one portion of the semiconductor chip may be designated to the particular function and at least one other portion of the semiconductor chip to the different particular function. The semiconductor chip may thus act as a function switch.
    Type: Grant
    Filed: November 2, 2001
    Date of Patent: May 11, 2004
    Assignee: Taiwan Semiconductor Manufacturing Co. Ltd.
    Inventors: Jun-Xiu Liu, Ming-Shuo Yen, Chiu-Bian Kuo, Chun-Hsiung Peng
  • Publication number: 20030085437
    Abstract: A method and system for implementing a variable function circuit within a single semiconductor chip. The semiconductor chip can be configured as a single circuit that provides varying functions according to extrinsic conditions. The single circuit can be permitted to be switched between a particular function and a different particular function, thereby promoting a decreased complexity in circuit design and a decrease in physical dimensions necessary to manufacture the semiconductor chip. Additionally, at least one portion of the semiconductor chip may be designated to the particular function and at least one other portion of the semiconductor chip to the different particular function. The semiconductor chip may thus act as a function switch.
    Type: Application
    Filed: November 2, 2001
    Publication date: May 8, 2003
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jun-Xiu Liu, Ming-Shuo Yen, Chiu-Bian Kuo, Chun-Hsiung Peng