Patents by Inventor Chun-Hsiung Wang

Chun-Hsiung Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240136418
    Abstract: A device includes an active region, a gate structure, a source/drain epitaxial structure, an epitaxial layer, a metal alloy layer, a contact, and a contact etch stop layer. The gate structure is across the active region. The source/drain epitaxial structure is over the active region and adjacent the gate structure. The epitaxial layer is over the source/drain epitaxial structure. The metal alloy layer is over the epitaxial layer. The contact is over the metal alloy layer. The contact etch stop layer lines sidewalls of the source/drain epitaxial structure. The metal alloy layer is spaced apart from the contact etch stop layer.
    Type: Application
    Filed: January 3, 2024
    Publication date: April 25, 2024
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shih-Cheng CHEN, Chun-Hsiung LIN, Chih-Hao WANG
  • Patent number: 11961892
    Abstract: A semiconductor device and methods of forming the same are disclosed. The semiconductor device includes a substrate, first and second source/drain (S/D) regions, a channel between the first and second S/D regions, a gate engaging the channel, and a contact feature connecting to the first S/D region. The contact feature includes first and second contact layers. The first contact layer has a conformal cross-sectional profile and is in contact with the first S/D region on at least two sides thereof. In embodiments, the first contact layer is in direct contact with three or four sides of the first S/D region so as to increase the contact area. The first contact layer includes one of a semiconductor-metal alloy, an III-V semiconductor, and germanium.
    Type: Grant
    Filed: June 10, 2022
    Date of Patent: April 16, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Carlos H. Diaz, Chung-Cheng Wu, Chia-Hao Chang, Chih-Hao Wang, Jean-Pierre Colinge, Chun-Hsiung Lin, Wai-Yi Lien, Ying-Keung Leung
  • Publication number: 20240088899
    Abstract: A logic cell structure includes a first portion, a second portion and a third portion. The first portion, arranged to be a first layout of a first semiconductor element, is placed in a first cell row of a substrate area extending in a first direction. The second portion, arranged to be a second layout of a second semiconductor element, is placed in a second cell row of the substrate area. The third portion is arranged to be a third layout of an interconnecting path used for coupling the first semiconductor element and the second semiconductor element. The first, second and third portions are bounded by a bounding box with a height in a second direction and a width in the first direction. Respective centers of the first portion and the second portion are arranged in a third direction different from each of the first direction and the second direction.
    Type: Application
    Filed: November 24, 2023
    Publication date: March 14, 2024
    Inventors: SHAO-HUAN WANG, CHUN-CHEN CHEN, SHENG-HSIUNG CHEN, KUO-NAN YANG
  • Patent number: 11929417
    Abstract: A semiconductor device and methods of forming the same are disclosed. The semiconductor device includes a substrate, first and second source/drain (S/D) regions, a channel between the first and second S/D regions, a gate engaging the channel, and a contact feature connecting to the first S/D region. The contact feature includes first and second contact layers. The first contact layer has a conformal cross-sectional profile and is in contact with the first S/D region on at least two sides thereof. In embodiments, the first contact layer is in direct contact with three or four sides of the first S/D region so as to increase the contact area. The first contact layer includes one of a semiconductor-metal alloy, an III-V semiconductor, and germanium.
    Type: Grant
    Filed: June 30, 2022
    Date of Patent: March 12, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Carlos H. Diaz, Chung-Cheng Wu, Chia-Hao Chang, Chih-Hao Wang, Jean-Pierre Colinge, Chun-Hsiung Lin, Wai-Yi Lien, Ying-Keung Leung
  • Publication number: 20220254705
    Abstract: The present disclosure is related to a lead frame structure. The lead frame structure includes a bottom board and a blocking wall. The bottom board has a first conductive portion and a second conductive portion. The first conductive portion separates from the second conductive portion. The first and second conductive portions are configured to electrically connect to a light source. The blocking wall is located on the bottom board, and the blocking wall surrounds an opening. The first and the second conductive portions are exposed from the opening. The first and the second conductive portions each have an extending portion. The extending portion extends beyond an external surface of the blocking wall in a horizontal direction.
    Type: Application
    Filed: April 14, 2021
    Publication date: August 11, 2022
    Inventors: Jian-Tsai CHANG, Chin-Jui YU, Chun-Hsiung WANG, Wei-Chi LIN
  • Patent number: 10396204
    Abstract: A semiconductor device includes: a gate structure extending along a first direction on a substrate, in which the gate structure includes a first edge and a second edge extending along the first direction; a first doped region adjacent to one side of the gate structure, in which the first doped region includes a third edge and a fourth edge extending along the first direction; a second doped region adjacent to another side of the gate structure, in which the second doped region comprises a fifth edge and a sixth edge extending along the first direction; a first fin-shaped structure extending from the second edge of the gate structure toward the third edge of the first doped region; and a second fin-shaped structure extending from the first edge of the gate structure toward the sixth edge of the second doped region.
    Type: Grant
    Filed: September 11, 2017
    Date of Patent: August 27, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Che-Wei Chang, Chun-Hsiung Wang, Chih-Wei Chen
  • Publication number: 20190229173
    Abstract: A light emitting device includes a transistor and the transistor has a gate layer, and a dielectric under the gate layer. The light emitting device also includes a capacitor coupled to the transistor The capacitor including a first electrode, a second electrode over the first electrode, and a dielectric between the first and second electrode. The tight emitting device further includes a contact dielectric seprataing the transistor and the capacitor. The dielectric fully surrounds the capacitor and the transistor, wherein the contact dielectric is nitrogen free.
    Type: Application
    Filed: January 23, 2018
    Publication date: July 25, 2019
    Inventors: CHUN-HSIUNG WANG, CHENG-HSIN CHEN, JIA-WEI WU
  • Publication number: 20180076327
    Abstract: A semiconductor device includes: a gate structure extending along a first direction on a substrate, in which the gate structure includes a first edge and a second edge extending along the first direction; a first doped region adjacent to one side of the gate structure, in which the first doped region includes a third edge and a fourth edge extending along the first direction; a second doped region adjacent to another side of the gate structure, in which the second doped region comprises a fifth edge and a sixth edge extending along the first direction; a first fin-shaped structure extending from the second edge of the gate structure toward the third edge of the first doped region; and a second fin-shaped structure extending from the first edge of the gate structure toward the sixth edge of the second doped region.
    Type: Application
    Filed: September 11, 2017
    Publication date: March 15, 2018
    Inventors: Che-Wei Chang, Chun-Hsiung Wang, Chih-Wei Chen
  • Patent number: 9837541
    Abstract: A semiconductor device includes: a gate structure on a substrate; a first doped region adjacent to one side of the gate structure; a second doped region adjacent to another side of the gate structure; and fin-shaped structures on the substrate. Preferably, a number of the fin-shaped structures covered by the gate structure is different from a number of the fin-shaped structures overlapping the first doped region or the second doped region.
    Type: Grant
    Filed: November 7, 2016
    Date of Patent: December 5, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Che-Wei Chang, Chun-Hsiung Wang, Chih-Wei Chen
  • Publication number: 20170132097
    Abstract: A power supply apparatus with reverse current protection includes a digital signal processor, a secondary side rectifying circuit, a voltage detection unit and a current detection unit. A plurality of the power supply apparatuses are connected in parallel and applied to a server system. When the voltage detection unit detects that a bus voltage is greater than a predetermined voltage and the current detection unit detects that an output current is less than a predetermined current, the voltage detection unit and the current detection unit inform the digital signal processor that the bus voltage is greater than the predetermined voltage and the output current is less than the predetermined current respectively, so that the digital signal processor turns off the secondary side rectifying circuit to stop outputting power.
    Type: Application
    Filed: November 6, 2015
    Publication date: May 11, 2017
    Inventors: Chun-Hsiung WANG, Kai-Ming CHEN, Shing-Feng YANG
  • Patent number: 9147612
    Abstract: The present invention provides a manufacturing method for forming a semiconductor structure, in which first, a substrate is provided, a hard mask is disposed on the substrate, the hard mask is then patterned to form a plurality of fin hard masks and a plurality of dummy fin hard masks, afterwards, a pattern transferring process is performed, to transfer the patterns of the fin hard masks and the fin hard masks into the substrate, so as to form a plurality of fin groups and a plurality of dummy fins. Each dummy fin is disposed on the end side of one fin group, and a fin cut process is performed, to remove each dummy fin.
    Type: Grant
    Filed: November 25, 2013
    Date of Patent: September 29, 2015
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Po-Cheng Huang, I-Ming Tseng, Yu-Ting Li, Chun-Hsiung Wang, Wu-Sian Sie, Yi-Liang Liu, Chia-Lin Hsu, Po-Chao Tsao, Chien-Ting Lin, Shih-Fang Tzou
  • Publication number: 20150214114
    Abstract: A manufacturing method of a semiconductor structure is disclosed. The manufacturing method includes the following steps. A substrate with a plurality of dummy gate structures formed thereon and a first dielectric layer covering the dummy gate structures is provided, the dummy gate structures comprising a plurality of dummy gates and a plurality of insulating layers formed on the dummy gates, wherein at least two of the dummy gate structures have different heights. A first planarization process is performed to expose at least one of the dummy gate structures having the highest height. A first etching process is performed to expose the insulating layers. A chemical mechanical polishing (CMP) process with a non-selectivity slurry is performed to planarize the dummy gate structures. The planarized dummy gate structures are removed to form a plurality of gate trenches.
    Type: Application
    Filed: January 28, 2014
    Publication date: July 30, 2015
    Applicant: United Microelectronics Corp.
    Inventors: Po-Cheng Huang, Yu-Ting Li, Wu-Sian Sie, Yi-Liang Liu, Chun-Hsiung Wang, Kun-Ju Li, Chia-Lin Hsu, Chih-Chien Liu
  • Patent number: 9093465
    Abstract: A method of fabricating a semiconductor device includes the following steps. A substrate including at least a fin structure is provided, and a material layer is formed to cover the fin structure. Then, a first planarization process is performed on the material layer to form a first material layer, and an oxide layer is formed on the first material layer. Subsequently, the oxide layer is totally removed to expose the first material layer, and a second material layer is formed in-situ on the first material layer after totally removing the oxide layer.
    Type: Grant
    Filed: December 11, 2013
    Date of Patent: July 28, 2015
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Yu-Ting Li, Po-Cheng Huang, Wu-Sian Sie, Chun-Hsiung Wang, Yi-Liang Liu, Chia-Lin Hsu, Rai-Min Huang
  • Publication number: 20150162419
    Abstract: A method of fabricating a semiconductor device includes the following steps. A substrate including at least a fin structure is provided, and a material layer is formed to cover the fin structure. Then, a first planarization process is performed on the material layer to form a first material layer, and an oxide layer is formed on the first material layer. Subsequently, the oxide layer is totally removed to expose the first material layer, and a second material layer is formed in-situ on the first material layer after totally removing the oxide layer.
    Type: Application
    Filed: December 11, 2013
    Publication date: June 11, 2015
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Yu-Ting Li, Po-Cheng Huang, Wu-Sian Sie, Chun-Hsiung Wang, Yi-Liang Liu, Chia-Lin Hsu, Rai-Min Huang
  • Publication number: 20150147874
    Abstract: The present invention provides a manufacturing method for forming a semiconductor structure, in which first, a substrate is provided, a hard mask is disposed on the substrate, the hard mask is then patterned to form a plurality of fin hard masks and a plurality of dummy fin hard masks, afterwards, a pattern transferring process is performed, to transfer the patterns of the fin hard masks and the fin hard masks into the substrate, so as to form a plurality of fin groups and a plurality of dummy fins. Each dummy fin is disposed on the end side of one fin group, and a fin cut process is performed, to remove each dummy fin.
    Type: Application
    Filed: November 25, 2013
    Publication date: May 28, 2015
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Po-Cheng Huang, I-Ming Tseng, Yu-Ting Li, Chun-Hsiung Wang, Wu-Sian Sie, Yi-Liang Liu, Chia-Lin Hsu, Po-Chao Tsao, Chien-Ting Lin, Shih-Fang Tzou
  • Publication number: 20150140819
    Abstract: A semiconductor process includes the following steps. A substrate having trenches with different sizes is provided. A first oxide layer is formed to entirely cover the substrate. A prevention layer is formed on the first oxide layer. A first filling layer is formed on the prevention layer and fills the trenches until the first filling layer is higher than the substrate. A first polishing process is performed to polish the first filling layer until exposing the prevention layer. A second polishing process is performed to polish the first filling layer, the prevention layer and the first oxide layer until the substrate is exposed.
    Type: Application
    Filed: November 19, 2013
    Publication date: May 21, 2015
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Po-Cheng Huang, Yu-Ting Li, Chun-Hsiung Wang, Wu-Sian Sie, Yi-Liang Liu, Chia-Lin Hsu, I-Ming Tseng
  • Patent number: 9012300
    Abstract: A manufacturing method for a shallow trench isolation. First, a substrate is provided, a hard mask layer and a patterned photoresist layer are sequentially formed on the substrate, at least one trench is then formed in the substrate through an etching process, the hard mask layer is removed. Afterwards, a filler is formed at least in the trench and a planarization process is then performed on the filler. Since the planarization process is performed only on the filler, so the dishing phenomenon can effectively be avoided.
    Type: Grant
    Filed: October 1, 2012
    Date of Patent: April 21, 2015
    Assignee: United Microelectronics Corp.
    Inventors: Wu-Sian Sie, Chun-Wei Hsu, Chia-Lung Chang, Chih-Hsun Lin, Chang-Hung Kung, Yu-Ting Li, Wei-Che Tsao, Yen-Ming Chen, Chun-Hsiung Wang, Chia-Lin Hsu
  • Publication number: 20150079780
    Abstract: A method of forming a semiconductor device is disclosed. A gate structure is formed on a substrate. The gate structure includes a dummy gate and a spacer at a sidewall of the dummy gate. A dielectric layer is formed on the substrate outside of the gate structure. A metal hard mask layer is formed to cover tops of the dielectric layer and the spacer and to expose a surface of the gate structure. The dummy gate is removed to form a gate trench. A low-resistivity metal layer is formed on the metal hard mask layer filling in the gate trench. The low-resistivity metal layer outside of the gate trench is removed. The metal hard mask layer is removed.
    Type: Application
    Filed: September 13, 2013
    Publication date: March 19, 2015
    Applicant: United Microelectronics Corp.
    Inventors: Yl-Liang Liu, Wu-Sian Sie, Po-Cheng Huang, Chih-Hsien Chen, I-Lun Hung, Yen-Ming Chen, Yu-Ting Li, Chang-Hung Kung, Chun-Hsiung Wang, Chia-Lin Hsu
  • Publication number: 20140094017
    Abstract: A manufacturing method for a shallow trench isolation. First, a substrate is provided, a hard mask layer and a patterned photoresist layer are sequentially formed on the substrate, at least one trench is then formed in the substrate through an etching process, the hard mask layer is removed. Afterwards, a filler is formed at least in the trench and a planarization process is then performed on the filler. Since the planarization process is performed only on the filler, so the dishing phenomenon can effectively be avoided.
    Type: Application
    Filed: October 1, 2012
    Publication date: April 3, 2014
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Wu-Sian Sie, Chun-Wei Hsu, Chia-Lung Chang, Chih-Hsun Lin, Chang-Hung Kung, Yu-Ting Li, Wei-Che Tsao, Yen-Ming Chen, Chun-Hsiung Wang, Chia-Lin Hsu
  • Patent number: 8605003
    Abstract: A miniature wire antenna includes N rectangular metal plates located at a first layer of a PCB, a tunable metal plate located at the first layer of the PCB and N serpentine lines located at a second layer of the PCB. The positions of the N serpentine lines correspond to the positions of the rectangular metal plates. A first end of each of the serpentine lines is connected to the corresponding rectangular metal plate, and a second end of each of the serpentine lines is connected to the next rectangular metal plate. A first end of the last serpentine line is connected to the corresponding rectangular metal plate, and a second end of the last serpentine line is connected to the tunable metal plate.
    Type: Grant
    Filed: March 17, 2010
    Date of Patent: December 10, 2013
    Assignee: ASUSTeK Computer Inc.
    Inventors: Ming-Iu Lai, Chun-Hsiung Wang