Abstract: Interconnect structures and methods and apparatuses for forming the same are disclosed. In an embodiment, a method includes supplying a process gas to a process chamber; igniting the process gas into a plasma in the process chamber; reducing a pressure of the process chamber to less than 0.3 mTorr; and after reducing the pressure of the process chamber, depositing a conductive layer on a substrate in the process chamber.

Abstract: Interconnect structures and methods and apparatuses for forming the same are disclosed. In an embodiment, a method includes supplying a process gas to a process chamber; igniting the process gas into a plasma in the process chamber; reducing a pressure of the process chamber to less than 0.3 mTorr; and after reducing the pressure of the process chamber, depositing a conductive layer on a substrate in the process chamber.

Abstract: Interconnect structures and methods and apparatuses for forming the same are disclosed. In an embodiment, a method includes supplying a process gas to a process chamber; igniting the process gas into a plasma in the process chamber; reducing a pressure of the process chamber to less than 0.3 mTorr; and after reducing the pressure of the process chamber, depositing a conductive layer on a substrate in the process chamber.

Abstract: Interconnect structures and methods and apparatuses for forming the same are disclosed. In an embodiment, a method includes supplying a process gas to a process chamber; igniting the process gas into a plasma in the process chamber; reducing a pressure of the process chamber to less than 0.3 mTorr; and after reducing the pressure of the process chamber, depositing a conductive layer on a substrate in the process chamber.

Abstract: A thermophoretic sampler includes a sample assembly into which a removable sample cartridge can be inserted. The sample cartridge holds a substrate that, upon insertion, is exposed to a sample chamber. Thermophoresis is induced in the sample chamber, causing nanoparticles to be deposited on the substrate.

Abstract: A thermophoretic sampler includes a sample assembly into which a removable sample cartridge can be inserted. The sample cartridge holds a substrate that, upon insertion, is exposed to a sample chamber. Thermophoresis is induced in the sample chamber, causing nanoparticles to be deposited on the substrate.

Abstract: A thermophoretic sampler includes a sample assembly into which a removable sample cartridge can be inserted. The sample cartridge holds a substrate that, upon insertion, is exposed to a sample chamber. Thermophoresis is induced in the sample chamber, causing nanoparticles to be deposited on the substrate.

Abstract: A biosensor with a dual gate structure is disclosed herein. The biosensor comprises: a transistor, a sensing pad, and a plurality of nanostructures. The sensing pad has a conductive area working as another gate and neighboring to the channel layer of the transistor, and a sensing area extended outward from the conductive area to be far away from the channel layer of the transistor, wherein the gate and the conductive area of the sensing pad are separated from each other by the channel layer. The plurality of nanostructures are utilized to bind a first protein to generate a drain current value, when the first protein is combined with the target protein and another drain current value is generated, whereby a variation between the two drain current values is calculated to obtain the concentration of the target protein in the protein solution.

Abstract: A thermophoretic sampler includes a sample assembly into which a removable sample cartridge can be inserted. The sample cartridge holds a substrate that, upon insertion, is exposed to a sample chamber. Thermophoresis is induced in the sample chamber, causing nanoparticles to be deposited on the substrate.