Abstract: Provided are a micro-electro-mechanical system (MEMS) probe card and a method for manufacturing thereof. The MEMS probe card includes a substrate provide with a via hole filler conductor or a via hole filled with the resistor, the resistive film formed on the via hole and the substrate, the insulating film and the resistive film formed on the resistive film and the substrate, and the electrode formed on the substrate to cover the insulating film As such, by means of a micro-electro-mechanical system (MEMS) probe card and a method for manufacturing thereof, the precise resistance value can be obtained and used for the semiconductor IC and others in the event of significant change in power.