Abstract: A noble method of forming thin films for producing semiconductor or flat panel display devices is disclosed. The method is a way of effectively forming thin films on a substrate even if reactants do not react readily in a time-divisional process gas supply sequence in a reactor by supplying reactant gases and a purge gas cyclically and sequentially in order to prevent gas-phase reactions between the reactant gases and also by generating plasma directly on a substrate synchronously with the process gas supply cycle. The method has advantages of effective thin film formation even if the reactant gases do not react readily, minimization of the purge gas supply time for reduction in process time, reduction of particle contamination during film formation process, as well as thin film formation at low temperatures.

Abstract: A chemical deposition reactor capable of switching rapidly from one process gas to another and method of forming a thin film using the same. The reactor of the present invention comprises: a reactor cover, having an inlet and an outlet, for keeping reactant gases from other part of the reactor where the pressure is lower than inside of the reactor; a gas flow control plate, fixed onto the reactor cover, for controlling the gas flow through inlet and outlet by the spacing between itself and the reactor cover; and a substrate supporting plate for confining a reaction cell with the reactor cover. The method of the present invention can be accomplished using the above reactor. In the method, process gases including a deposition gas, a reactant gas and a purge gas are sequentially and repeatedly supplied in the reactor to form a thin film on a substrate. A RF (Radio Frequency) plasma power is applied to a plasma electrode of the reactor synchronised with the supply of at least one among the process gases.

Abstract: A portable computer for wireless communication with peripheral devices over an infrared communication link. The portable computer is capable of automatically controlling an infrared signal direction for greater data transfer efficiency over the infrared communication link.

Abstract: A portable computer that uses multiple sub-batteries, that are the collective equivalent of one regular computer battery, that are serially connected to power a portable computer. The sub-batteries each contain a small number of battery cells and are connected to the main circuit board, or mother board, of the portable computer to supply power to the portable computer. An electric connecting means may be adapted for connecting two sub-batteries to the motherboard. The multiple sub-battery system allows a more flexible layout design for the installation of various internal components inside of the portable computer. Thus, the small sized battery seats can be placed in various, priorly unusable space, places. Now portions of the computer's battery system can be stored in the corners of the housing, or in narrow spots between other internal components.