Abstract: A micro-electro mechanical system (MEMS) device includes a MEMS substrate, at least one movable element laterally confined within a matrix layer that overlies the MEMS substrate, and a cap substrate bonded to the matrix layer through bonding material portions. A first movable element selected from the at least one movable element is located inside a first chamber that is laterally bounded by the matrix layer and vertically bounded by a first capping surface that overlies the first movable element. The first capping surface includes an array of downward-protruding bumps including respective portions of a dielectric material layer. Each of the downward-protruding bumps has a vertical cross-sectional profile of an inverted hillock. The MEMS device can include, for example, an accelerometer.

Abstract: An electric release fastening device for a thin-profile space has a fingerprint identifier, a micro drive motor, a change gear set, an electric controller, an electric battery, a moveable fastening cassette, a fastening cassette control unit and a locking locator. When the fingerprint identifier reads the correct identification information, the micro drive motor is ordered by the electric controller to drive the change gear set, and then change the position of the fastening cassette control unit. This switches the positioning or release state between the moveable fastening cassette and the locking locator, and controls or electrically releases the product cover. With this configuration, the electric release fastening device can be assembled into thin-profile spaces with improved applicability.

Abstract: An electric release fastening device for a thin-profile space has a fingerprint identifier, a micro drive motor, a change gear set, an electric controller, an electric battery, a moveable fastening cassette, a fastening cassette control unit and a locking locator. When the fingerprint identifier reads the correct identification information, the micro drive motor is ordered by the electric controller to drive the change gear set, and then change the position of the fastening cassette control unit. This switches the positioning or release state between the moveable fastening cassette and the locking locator, and controls or electrically releases the product cover. With this configuration, the electric release fastening device can be assembled into thin-profile spaces with improved applicability.