Patents by Inventor Chun-Yu Kao
Chun-Yu Kao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12266529Abstract: A method includes depositing a first mask over a target layer; forming a first mandrel and a second mandrel over the first mask; forming first spacers on the first mandrel and second spacers on the second mandrel; and selectively removing the second spacers while masking the first spacers. Masking the first spacers comprising covering the first spacers with a second mask and a capping layer over the second mask, and the capping layer comprises carbon. The method further includes patterning the first mask and transferring a pattern of the first mask to the target layer. Patterning the first mask comprises masking the first mask with the second mandrel, the first mandrel, and the first spacers.Type: GrantFiled: November 3, 2023Date of Patent: April 1, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chun-Yu Kao, Sung-En Lin, Chia-Cheng Chao
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Publication number: 20240379359Abstract: A method includes depositing a first mask over a target layer; forming a first mandrel and a second mandrel over the first mask; forming first spacers on the first mandrel and second spacers on the second mandrel; and selectively removing the second spacers while masking the first spacers. Masking the first spacers comprising covering the first spacers with a second mask and a capping layer over the second mask, and the capping layer comprises carbon. The method further includes patterning the first mask and transferring a pattern of the first mask to the target layer. Patterning the first mask comprises masking the first mask with the second mandrel, the first mandrel, and the first spacers.Type: ApplicationFiled: July 24, 2024Publication date: November 14, 2024Inventors: Chun-Yu Kao, Sung-En Lin, Chia-Cheng Chao
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Publication number: 20240357740Abstract: Provided is a micro-roughened electrodeposited copper foil, which comprises a micro-rough surface and multiple copper nodules. The micro-roughened electrodeposited copper foil has an Sdr of 0.01 to 0.08. With the surface characteristics, the electron path distance can be shortened, such that the micro-roughened electrodeposited copper foil can reduce the insertion loss of the copper clad laminate at high frequencies and have the desired peel strength.Type: ApplicationFiled: July 1, 2024Publication date: October 24, 2024Inventors: Yun-Hsing SUNG, Shih-Shen Lee, Hung-Wei Hsu, Chun-Yu Kao
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Patent number: 12120816Abstract: Provided is a micro-roughened electrodeposited copper foil, which comprises a micro-rough surface and multiple copper nodules. The micro-roughened electrodeposited copper foil has an Rlr value of 1.05 to 1.60, or an Sdr of 0.01 to 0.08. With the surface characteristics, the electron path distance can be shortened, such that the micro-roughened electrodeposited copper foil can reduce the insertion loss of the copper clad laminate at high frequencies and have the desired peel strength.Type: GrantFiled: June 23, 2021Date of Patent: October 15, 2024Assignee: CO-TECH DEVELOPMENT CORP.Inventors: Yun-Hsing Sung, Shih-Shen Lee, Hung-Wei Hsu, Chun-Yu Kao
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Publication number: 20240063020Abstract: A method includes depositing a first mask over a target layer; forming a first mandrel and a second mandrel over the first mask; forming first spacers on the first mandrel and second spacers on the second mandrel; and selectively removing the second spacers while masking the first spacers. Masking the first spacers comprising covering the first spacers with a second mask and a capping layer over the second mask, and the capping layer comprises carbon. The method further includes patterning the first mask and transferring a pattern of the first mask to the target layer. Patterning the first mask comprises masking the first mask with the second mandrel, the first mandrel, and the first spacers.Type: ApplicationFiled: November 3, 2023Publication date: February 22, 2024Inventors: Chun-Yu Kao, Sung-En Lin, Chia-Cheng Chao
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Patent number: 11848209Abstract: A method includes depositing a first mask over a target layer; forming a first mandrel and a second mandrel over the first mask; forming first spacers on the first mandrel and second spacers on the second mandrel; and selectively removing the second spacers while masking the first spacers. Masking the first spacers comprising covering the first spacers with a second mask and a capping layer over the second mask, and the capping layer comprises carbon. The method further includes patterning the first mask and transferring a pattern of the first mask to the target layer. Patterning the first mask comprises masking the first mask with the second mandrel, the first mandrel, and the first spacers.Type: GrantFiled: May 7, 2021Date of Patent: December 19, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chun-Yu Kao, Sung-En Lin, Chia-Cheng Chao
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Patent number: 11655555Abstract: An advanced reverse treated electrodeposited copper foil and a copper clad laminate using the same are provided. The advanced reverse treated electrodeposited copper foil has an uneven micro-roughened surface. The micro-roughened surface has a plurality of copper crystals, a plurality of copper whiskers and a plurality of copper crystal groups, which are in a non-uniform distribution to form a non-uniformly distributed horizontal or vertical stripe pattern.Type: GrantFiled: June 12, 2020Date of Patent: May 23, 2023Assignee: CO-TECH DEVELOPMENT CORP.Inventors: Yun-Hsing Sung, Shih-Shen Lee, Hung-Wei Hsu, Chun-Yu Kao
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Publication number: 20220277958Abstract: A method includes depositing a first mask over a target layer; forming a first mandrel and a second mandrel over the first mask; forming first spacers on the first mandrel and second spacers on the second mandrel; and selectively removing the second spacers while masking the first spacers. Masking the first spacers comprising covering the first spacers with a second mask and a capping layer over the second mask, and the capping layer comprises carbon. The method further includes patterning the first mask and transferring a pattern of the first mask to the target layer. Patterning the first mask comprises masking the first mask with the second mandrel, the first mandrel, and the first spacers.Type: ApplicationFiled: May 7, 2021Publication date: September 1, 2022Inventors: Chun-Yu Kao, Sung-En Lin, Chia-Cheng Chao
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Patent number: 11408087Abstract: An advanced electrodeposited copper foil having island-shaped microstructures and a copper clad laminate using the same are provided. The advanced electrodeposited copper foil includes a micro-roughened surface. The micro-roughened surface has a plurality of copper crystals, a plurality of copper whiskers and a plurality of copper crystal groups which are in a non-uniform distribution and form into island-shaped patterns.Type: GrantFiled: June 19, 2020Date of Patent: August 9, 2022Assignee: CO-TECH DEVELOPMENT CORP.Inventors: Yun-Hsing Sung, Shih-Shen Lee, Hung-Wei Hsu, Chun-Yu Kao
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Patent number: 11332839Abstract: An advanced electrodeposited copper foil and a copper clad laminate using the same are provided. The advanced electrodeposited copper foil has an uneven micro-roughened surface. As observed by a scanning electron microscope operated with a +35 degree tilt and under 1,000× magnification, the uneven micro-roughened surface has a plurality of production direction stripes formed by copper crystals.Type: GrantFiled: June 18, 2020Date of Patent: May 17, 2022Assignee: CO-TECH DEVELOPMENT CORP.Inventors: Yun-Hsing Sung, Shih-Shen Lee, Hung-Wei Hsu, Chun-Yu Kao
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Publication number: 20210321514Abstract: Provided is a micro-roughened electrodeposited copper foil, which comprises a micro-rough surface and multiple copper nodules. The micro-roughened electrodeposited copper foil has an Rlr value of 1.05 to 1.60, or an Sdr of 0.01 to 0.08. With the surface characteristics, the electron path distance can be shortened, such that the micro-roughened electrodeposited copper foil can reduce the insertion loss of the copper clad laminate at high frequencies and have the desired peel strength.Type: ApplicationFiled: June 23, 2021Publication date: October 14, 2021Inventors: Yun-Hsing SUNG, Shih-Shen LEE, Hung-Wei HSU, Chun-Yu KAO
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Patent number: 11053602Abstract: A micro-roughened electrodeposited copper foil and a copper foil substrate are provided. The micro-roughened electrodeposited copper foil includes a micro-rough surface. The micro-rough surface has a plurality of peaks, a plurality of V-shaped grooves and a plurality of micro-crystal clusters. Each of the V-shaped grooves is defined by adjacent two of the peaks and has an average depth less than 1 ?m. The micro-crystal clusters are correspondingly located on the tops of the peaks and each thereof has an average height less than 1.5 ?m. The micro-rough surface of the micro-roughened electrodeposited copper foil has an Rlr value less than 1.06.Type: GrantFiled: September 9, 2019Date of Patent: July 6, 2021Assignee: CO-TECH DEVELOPMENT CORP.Inventors: Yun-Hsing Sung, Chun-Yu Kao
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Patent number: 11047061Abstract: A micro-roughened electrodeposited copper foil and a copper foil substrate are provided. The micro-roughened electrodeposited copper foil includes a micro-rough surface. The micro-rough surface has a plurality of peaks, a plurality of grooves and a plurality of micro-crystal clusters. Each of the grooves has a U-shaped or V-shaped cross-section profile, and the grooves have an average maximum width between 0.1 ?m and 4 ?m and an average depth less than or equal to 1.5 ?m. Each of the micro-crystal clusters is composed of a plurality of micro-crystals each having an average diameter less than or equal to 0.5 ?m grouped together. The micro-rough surface of the micro-roughened electrodeposited copper foil has an Rlr value less than 1.3. The micro-rough surface has good bonding strength relative to a substrate, and the copper foil substrate has good insertion loss performance to significantly reduce signal loss.Type: GrantFiled: September 9, 2019Date of Patent: June 29, 2021Assignee: CO-TECH DEVELOPMENT CORP.Inventors: Yun-Hsing Sung, Chun-Yu Kao, Zong-Xian Wu
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Publication number: 20200404784Abstract: Provided is a micro-roughened electrodeposited copper foil, which comprises a micro-rough surface and multiple copper nodules. The micro-rough surface includes multiple copper nodule-free areas and copper nodule-arranged areas. The micro-rough surface of 120 ?m2 has at least five copper nodule-free areas of 62500 nm2 or more. Each copper nodule-arranged area has a length of 300 nm to 2500 nm and includes three to fifty copper nodules with a mean width of 10 nm to 300 nm. Besides, the micro-roughened electrodeposited copper foil has an Rlr value of 1.05 to 1.60, or an Sdr of 0.01 to 0.08. With the surface profile and/or characteristics, the electron path distance can be shortened, such that the micro-roughened electrodeposited copper foil can reduce the insertion loss of the copper clad laminate at high frequencies and have the desired peel strength.Type: ApplicationFiled: June 12, 2020Publication date: December 24, 2020Inventors: Yun-Hsing SUNG, Shih-Shen LEE, Hung-Wei HSU, Chun-Yu KAO
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Publication number: 20200399775Abstract: An advanced electrodeposited copper foil and a copper clad laminate using the same are provided. The advanced electrodeposited copper foil has an uneven micro-roughened surface. As observed by a scanning electron microscope operated with a +35 degree tilt and under 1,000× magnification, the uneven micro-roughened surface has a plurality of production direction stripes formed by copper crystals.Type: ApplicationFiled: June 18, 2020Publication date: December 24, 2020Inventors: YUN-HSING SUNG, SHIH-SHEN LEE, HUNG-WEI HSU, CHUN-YU KAO
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Publication number: 20200399776Abstract: An advanced electrodeposited copper foil having long and island-shaped microstructures and a copper clad laminate using the same are provided. The advanced electrodeposited copper foil includes a micro-roughened surface. The micro-roughened surface has a plurality of copper crystals, a plurality of copper whiskers and a plurality of copper crystal groups which are in a non-uniform distribution and form into a long and island-shaped pattern.Type: ApplicationFiled: June 19, 2020Publication date: December 24, 2020Inventors: YUN-HSING SUNG, SHIH-SHEN LEE, HUNG-WEI HSU, CHUN-YU KAO
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Publication number: 20200392640Abstract: An advanced reverse treated electrodeposited copper foil and a copper clad laminate using the same are provided. The advanced reverse treated electrodeposited copper foil has an uneven micro-roughened surface. The micro-roughened surface has a plurality of copper crystals, a plurality of copper whiskers and a plurality of copper crystal groups, which are in a non-uniform distribution to form a non-uniformly distributed horizontal or vertical stripe pattern.Type: ApplicationFiled: June 12, 2020Publication date: December 17, 2020Inventors: YUN-HSING SUNG, SHIH-SHEN LEE, HUNG-WEI HSU, CHUN-YU KAO
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Publication number: 20200095701Abstract: A micro-roughened electrodeposited copper foil and a copper foil substrate are provided. The micro-roughened electrodeposited copper foil includes a micro-rough surface. The micro-rough surface has a plurality of peaks, a plurality of grooves and a plurality of micro-crystal clusters. Each of the grooves has a U-shaped or V-shaped cross-section profile, and the grooves have an average maximum width between 0.1 ?m and 4 ?m and an average depth less than or equal to 1.5 ?m. Each of the micro-crystal clusters is composed of a plurality of micro-crystals each having an average diameter less than or equal to 0.5 ?m grouped together. The micro-rough surface of the micro-roughened electrodeposited copper foil has an Rlr value less than 1.3. The micro-rough surface has good bonding strength relative to a substrate, and the copper foil substrate has good insertion loss performance to significantly reduce signal loss.Type: ApplicationFiled: September 9, 2019Publication date: March 26, 2020Inventors: YUN-HSING SUNG, CHUN-YU KAO, ZONG-XIAN WU
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Publication number: 20200087811Abstract: A micro-roughened electrodeposited copper foil and a copper foil substrate are provided. The micro-roughened electrodeposited copper foil includes a micro-rough surface. The micro-rough surface has a plurality of peaks, a plurality of V-shaped grooves and a plurality of micro-crystal clusters. Each of the V-shaped grooves is defined by adjacent two of the peaks and has an average depth less than 1 ?m. The micro-crystal clusters are correspondingly located on the tops of the peaks and each thereof has an average height less than 1.5 ?m. The micro-rough surface of the micro-roughened electrodeposited copper foil has an Rlr value less than 1.06.Type: ApplicationFiled: September 9, 2019Publication date: March 19, 2020Inventors: YUN-HSING SUNG, CHUN-YU KAO
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Publication number: 20100122515Abstract: The poison-filter material of the invention includes a substrate and a metal oxide. The substrate includes numerous holes, and the metal oxide is adhered to a surface of the substrate and the holes. The method for producing the poison-filter material of the invention includes the following steps of sonicating and impregnating a substrate into a metallic salt aqueous solution; and calcining the substrate to form a metal oxide on a surface of the substrate and numerous holes of the substrate, such that the poison-filter material is produced. In the invention, the metallic salt aqueous solution is fully oscillated to impregnate the porous substrate, and metal oxide is formed on the surface and holes of the substrate after high-temperature calcination. Therefore, the adsorbent material of the invention can effectively adsorb noxious gas and lower penetrability of noxious gas.Type: ApplicationFiled: November 18, 2008Publication date: May 20, 2010Inventors: Han-Wen Kuo, Jin-Feng Wang, Feng-Mei Fang, Jen-Chin Wu, Shiaw-Ruey Lin, Yuh Sung, Chen-Chia Huang, Chun-Yu Kao, Chien-Hung Chen