Patents by Inventor Chun-Yu Kao

Chun-Yu Kao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240063020
    Abstract: A method includes depositing a first mask over a target layer; forming a first mandrel and a second mandrel over the first mask; forming first spacers on the first mandrel and second spacers on the second mandrel; and selectively removing the second spacers while masking the first spacers. Masking the first spacers comprising covering the first spacers with a second mask and a capping layer over the second mask, and the capping layer comprises carbon. The method further includes patterning the first mask and transferring a pattern of the first mask to the target layer. Patterning the first mask comprises masking the first mask with the second mandrel, the first mandrel, and the first spacers.
    Type: Application
    Filed: November 3, 2023
    Publication date: February 22, 2024
    Inventors: Chun-Yu Kao, Sung-En Lin, Chia-Cheng Chao
  • Patent number: 11848209
    Abstract: A method includes depositing a first mask over a target layer; forming a first mandrel and a second mandrel over the first mask; forming first spacers on the first mandrel and second spacers on the second mandrel; and selectively removing the second spacers while masking the first spacers. Masking the first spacers comprising covering the first spacers with a second mask and a capping layer over the second mask, and the capping layer comprises carbon. The method further includes patterning the first mask and transferring a pattern of the first mask to the target layer. Patterning the first mask comprises masking the first mask with the second mandrel, the first mandrel, and the first spacers.
    Type: Grant
    Filed: May 7, 2021
    Date of Patent: December 19, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chun-Yu Kao, Sung-En Lin, Chia-Cheng Chao
  • Patent number: 11655555
    Abstract: An advanced reverse treated electrodeposited copper foil and a copper clad laminate using the same are provided. The advanced reverse treated electrodeposited copper foil has an uneven micro-roughened surface. The micro-roughened surface has a plurality of copper crystals, a plurality of copper whiskers and a plurality of copper crystal groups, which are in a non-uniform distribution to form a non-uniformly distributed horizontal or vertical stripe pattern.
    Type: Grant
    Filed: June 12, 2020
    Date of Patent: May 23, 2023
    Assignee: CO-TECH DEVELOPMENT CORP.
    Inventors: Yun-Hsing Sung, Shih-Shen Lee, Hung-Wei Hsu, Chun-Yu Kao
  • Publication number: 20220277958
    Abstract: A method includes depositing a first mask over a target layer; forming a first mandrel and a second mandrel over the first mask; forming first spacers on the first mandrel and second spacers on the second mandrel; and selectively removing the second spacers while masking the first spacers. Masking the first spacers comprising covering the first spacers with a second mask and a capping layer over the second mask, and the capping layer comprises carbon. The method further includes patterning the first mask and transferring a pattern of the first mask to the target layer. Patterning the first mask comprises masking the first mask with the second mandrel, the first mandrel, and the first spacers.
    Type: Application
    Filed: May 7, 2021
    Publication date: September 1, 2022
    Inventors: Chun-Yu Kao, Sung-En Lin, Chia-Cheng Chao
  • Patent number: 11408087
    Abstract: An advanced electrodeposited copper foil having island-shaped microstructures and a copper clad laminate using the same are provided. The advanced electrodeposited copper foil includes a micro-roughened surface. The micro-roughened surface has a plurality of copper crystals, a plurality of copper whiskers and a plurality of copper crystal groups which are in a non-uniform distribution and form into island-shaped patterns.
    Type: Grant
    Filed: June 19, 2020
    Date of Patent: August 9, 2022
    Assignee: CO-TECH DEVELOPMENT CORP.
    Inventors: Yun-Hsing Sung, Shih-Shen Lee, Hung-Wei Hsu, Chun-Yu Kao
  • Patent number: 11332839
    Abstract: An advanced electrodeposited copper foil and a copper clad laminate using the same are provided. The advanced electrodeposited copper foil has an uneven micro-roughened surface. As observed by a scanning electron microscope operated with a +35 degree tilt and under 1,000× magnification, the uneven micro-roughened surface has a plurality of production direction stripes formed by copper crystals.
    Type: Grant
    Filed: June 18, 2020
    Date of Patent: May 17, 2022
    Assignee: CO-TECH DEVELOPMENT CORP.
    Inventors: Yun-Hsing Sung, Shih-Shen Lee, Hung-Wei Hsu, Chun-Yu Kao
  • Publication number: 20210321514
    Abstract: Provided is a micro-roughened electrodeposited copper foil, which comprises a micro-rough surface and multiple copper nodules. The micro-roughened electrodeposited copper foil has an Rlr value of 1.05 to 1.60, or an Sdr of 0.01 to 0.08. With the surface characteristics, the electron path distance can be shortened, such that the micro-roughened electrodeposited copper foil can reduce the insertion loss of the copper clad laminate at high frequencies and have the desired peel strength.
    Type: Application
    Filed: June 23, 2021
    Publication date: October 14, 2021
    Inventors: Yun-Hsing SUNG, Shih-Shen LEE, Hung-Wei HSU, Chun-Yu KAO
  • Patent number: 11053602
    Abstract: A micro-roughened electrodeposited copper foil and a copper foil substrate are provided. The micro-roughened electrodeposited copper foil includes a micro-rough surface. The micro-rough surface has a plurality of peaks, a plurality of V-shaped grooves and a plurality of micro-crystal clusters. Each of the V-shaped grooves is defined by adjacent two of the peaks and has an average depth less than 1 ?m. The micro-crystal clusters are correspondingly located on the tops of the peaks and each thereof has an average height less than 1.5 ?m. The micro-rough surface of the micro-roughened electrodeposited copper foil has an Rlr value less than 1.06.
    Type: Grant
    Filed: September 9, 2019
    Date of Patent: July 6, 2021
    Assignee: CO-TECH DEVELOPMENT CORP.
    Inventors: Yun-Hsing Sung, Chun-Yu Kao
  • Patent number: 11047061
    Abstract: A micro-roughened electrodeposited copper foil and a copper foil substrate are provided. The micro-roughened electrodeposited copper foil includes a micro-rough surface. The micro-rough surface has a plurality of peaks, a plurality of grooves and a plurality of micro-crystal clusters. Each of the grooves has a U-shaped or V-shaped cross-section profile, and the grooves have an average maximum width between 0.1 ?m and 4 ?m and an average depth less than or equal to 1.5 ?m. Each of the micro-crystal clusters is composed of a plurality of micro-crystals each having an average diameter less than or equal to 0.5 ?m grouped together. The micro-rough surface of the micro-roughened electrodeposited copper foil has an Rlr value less than 1.3. The micro-rough surface has good bonding strength relative to a substrate, and the copper foil substrate has good insertion loss performance to significantly reduce signal loss.
    Type: Grant
    Filed: September 9, 2019
    Date of Patent: June 29, 2021
    Assignee: CO-TECH DEVELOPMENT CORP.
    Inventors: Yun-Hsing Sung, Chun-Yu Kao, Zong-Xian Wu
  • Publication number: 20200399775
    Abstract: An advanced electrodeposited copper foil and a copper clad laminate using the same are provided. The advanced electrodeposited copper foil has an uneven micro-roughened surface. As observed by a scanning electron microscope operated with a +35 degree tilt and under 1,000× magnification, the uneven micro-roughened surface has a plurality of production direction stripes formed by copper crystals.
    Type: Application
    Filed: June 18, 2020
    Publication date: December 24, 2020
    Inventors: YUN-HSING SUNG, SHIH-SHEN LEE, HUNG-WEI HSU, CHUN-YU KAO
  • Publication number: 20200399776
    Abstract: An advanced electrodeposited copper foil having long and island-shaped microstructures and a copper clad laminate using the same are provided. The advanced electrodeposited copper foil includes a micro-roughened surface. The micro-roughened surface has a plurality of copper crystals, a plurality of copper whiskers and a plurality of copper crystal groups which are in a non-uniform distribution and form into a long and island-shaped pattern.
    Type: Application
    Filed: June 19, 2020
    Publication date: December 24, 2020
    Inventors: YUN-HSING SUNG, SHIH-SHEN LEE, HUNG-WEI HSU, CHUN-YU KAO
  • Publication number: 20200404784
    Abstract: Provided is a micro-roughened electrodeposited copper foil, which comprises a micro-rough surface and multiple copper nodules. The micro-rough surface includes multiple copper nodule-free areas and copper nodule-arranged areas. The micro-rough surface of 120 ?m2 has at least five copper nodule-free areas of 62500 nm2 or more. Each copper nodule-arranged area has a length of 300 nm to 2500 nm and includes three to fifty copper nodules with a mean width of 10 nm to 300 nm. Besides, the micro-roughened electrodeposited copper foil has an Rlr value of 1.05 to 1.60, or an Sdr of 0.01 to 0.08. With the surface profile and/or characteristics, the electron path distance can be shortened, such that the micro-roughened electrodeposited copper foil can reduce the insertion loss of the copper clad laminate at high frequencies and have the desired peel strength.
    Type: Application
    Filed: June 12, 2020
    Publication date: December 24, 2020
    Inventors: Yun-Hsing SUNG, Shih-Shen LEE, Hung-Wei HSU, Chun-Yu KAO
  • Publication number: 20200392640
    Abstract: An advanced reverse treated electrodeposited copper foil and a copper clad laminate using the same are provided. The advanced reverse treated electrodeposited copper foil has an uneven micro-roughened surface. The micro-roughened surface has a plurality of copper crystals, a plurality of copper whiskers and a plurality of copper crystal groups, which are in a non-uniform distribution to form a non-uniformly distributed horizontal or vertical stripe pattern.
    Type: Application
    Filed: June 12, 2020
    Publication date: December 17, 2020
    Inventors: YUN-HSING SUNG, SHIH-SHEN LEE, HUNG-WEI HSU, CHUN-YU KAO
  • Publication number: 20200095701
    Abstract: A micro-roughened electrodeposited copper foil and a copper foil substrate are provided. The micro-roughened electrodeposited copper foil includes a micro-rough surface. The micro-rough surface has a plurality of peaks, a plurality of grooves and a plurality of micro-crystal clusters. Each of the grooves has a U-shaped or V-shaped cross-section profile, and the grooves have an average maximum width between 0.1 ?m and 4 ?m and an average depth less than or equal to 1.5 ?m. Each of the micro-crystal clusters is composed of a plurality of micro-crystals each having an average diameter less than or equal to 0.5 ?m grouped together. The micro-rough surface of the micro-roughened electrodeposited copper foil has an Rlr value less than 1.3. The micro-rough surface has good bonding strength relative to a substrate, and the copper foil substrate has good insertion loss performance to significantly reduce signal loss.
    Type: Application
    Filed: September 9, 2019
    Publication date: March 26, 2020
    Inventors: YUN-HSING SUNG, CHUN-YU KAO, ZONG-XIAN WU
  • Publication number: 20200087811
    Abstract: A micro-roughened electrodeposited copper foil and a copper foil substrate are provided. The micro-roughened electrodeposited copper foil includes a micro-rough surface. The micro-rough surface has a plurality of peaks, a plurality of V-shaped grooves and a plurality of micro-crystal clusters. Each of the V-shaped grooves is defined by adjacent two of the peaks and has an average depth less than 1 ?m. The micro-crystal clusters are correspondingly located on the tops of the peaks and each thereof has an average height less than 1.5 ?m. The micro-rough surface of the micro-roughened electrodeposited copper foil has an Rlr value less than 1.06.
    Type: Application
    Filed: September 9, 2019
    Publication date: March 19, 2020
    Inventors: YUN-HSING SUNG, CHUN-YU KAO
  • Publication number: 20100122515
    Abstract: The poison-filter material of the invention includes a substrate and a metal oxide. The substrate includes numerous holes, and the metal oxide is adhered to a surface of the substrate and the holes. The method for producing the poison-filter material of the invention includes the following steps of sonicating and impregnating a substrate into a metallic salt aqueous solution; and calcining the substrate to form a metal oxide on a surface of the substrate and numerous holes of the substrate, such that the poison-filter material is produced. In the invention, the metallic salt aqueous solution is fully oscillated to impregnate the porous substrate, and metal oxide is formed on the surface and holes of the substrate after high-temperature calcination. Therefore, the adsorbent material of the invention can effectively adsorb noxious gas and lower penetrability of noxious gas.
    Type: Application
    Filed: November 18, 2008
    Publication date: May 20, 2010
    Inventors: Han-Wen Kuo, Jin-Feng Wang, Feng-Mei Fang, Jen-Chin Wu, Shiaw-Ruey Lin, Yuh Sung, Chen-Chia Huang, Chun-Yu Kao, Chien-Hung Chen