Patents by Inventor Chun-Yuan Hsu
Chun-Yuan Hsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240096929Abstract: A method of making a semiconductor device includes forming a circuit layer over a substrate. The method further includes depositing an insulator over the substrate. The method further includes patterning the insulator to define a test line trench, a first trench, and a second trench, wherein the first trench is on a portion of the substrate exposed by the circuit layer. The method further includes filling the test line trench to define a test line electrically connected to the circuit layer. The method further includes filling the first trench and the second trench to define a capacitor.Type: ApplicationFiled: November 29, 2023Publication date: March 21, 2024Inventors: Yan-Jhih HUANG, Chun-Yuan HSU, Chien-Chung CHEN, Yung-Hsieh LIN
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Patent number: 11855126Abstract: A semiconductor device includes a substrate. The semiconductor device further includes a circuit layer over the substrate. The semiconductor device further includes a test line electrically connected to the circuit layer. The semiconductor device further includes a capacitor on the substrate. The capacitor includes a first conductor, wherein the first conductor is on a portion of the substrate exposed by the circuit layer. The capacitor further includes an insulator surrounding the first conductor.Type: GrantFiled: November 23, 2021Date of Patent: December 26, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yan-Jhih Huang, Chun-Yuan Hsu, Chien-Chung Chen, Yung-Hsieh Lin
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Publication number: 20230146080Abstract: A base structure in an electroplating system is provided. The base structure includes: includes: an annular member; a contact ring attached to an inner surface of the annular member and configured to be electrically connected to a wafer in an electroplating process; and a pair of shield structures attached to an upper surface of the annular member and extending in an vertical direction. Each of the pair of shield structures includes: a curved plate comprising a plurality of discharging openings, wherein plating solution residual is discharged through the plurality of discharging openings in a cleaning procedure; and a plurality of bevels, each of the plurality of bevels corresponding to each of the plurality of discharging openings and configured to guide the plating solution residual toward the corresponding discharging opening in the cleaning procedure.Type: ApplicationFiled: February 24, 2022Publication date: May 11, 2023Inventors: Chia-Sheng Lai, Chun-Yuan Hsu, Tzu-Chung Tsai
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Publication number: 20220085148Abstract: A semiconductor device includes a substrate. The semiconductor device further includes a circuit layer over the substrate. The semiconductor device further includes a test line electrically connected to the circuit layer. The semiconductor device further includes a capacitor on the substrate. The capacitor includes a first conductor, wherein the first conductor is on a portion of the substrate exposed by the circuit layer. The capacitor further includes an insulator surrounding the first conductor.Type: ApplicationFiled: November 23, 2021Publication date: March 17, 2022Inventors: Yan-Jhih HUANG, Chun-Yuan HSU, Chien-Chung CHEN, Yung-Hsieh LIN
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Patent number: 11201206Abstract: A semiconductor device includes a substrate. The semiconductor device further includes a circuit layer over the substrate. The semiconductor device further includes a test line on the circuit layer. The semiconductor device further includes a capacitor on the substrate. The capacitor includes a first conductor, wherein the first conductor is on a portion of the substrate exposed by the circuit layer; a second conductor; and an insulator between the first conductor and the second conductor, wherein the insulator surrounds the first conductor and the second conductor.Type: GrantFiled: February 3, 2020Date of Patent: December 14, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yan-Jhih Huang, Chun-Yuan Hsu, Chien-Chung Chen, Yung-Hsieh Lin
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Patent number: 10957728Abstract: A semiconductor device includes a semiconductor substrate, a device layer over the semiconductor substrate, a first color filter in a top surface of the device layer and adjacent to an edge of the device layer, and a second color filter in the top surface of the device layer. The second color filter has substantially the same thickness and the same color as the first color filter.Type: GrantFiled: November 30, 2018Date of Patent: March 23, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hung-Chang Chang, Chun-Yuan Hsu, Szu-Hung Yang
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Publication number: 20200176553Abstract: A semiconductor device includes a substrate. The semiconductor device further includes a circuit layer over the substrate. The semiconductor device further includes a test line on the circuit layer. The semiconductor device further includes a capacitor on the substrate. The capacitor includes a first conductor, wherein the first conductor is on a portion of the substrate exposed by the circuit layer; a second conductor; and an insulator between the first conductor and the second conductor, wherein the insulator surrounds the first conductor and the second conductor.Type: ApplicationFiled: February 3, 2020Publication date: June 4, 2020Inventors: Yan-Jhih HUANG, Chun-Yuan HSU, Chien-Chung CHEN, Yung-Hsieh LIN
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Patent number: 10553672Abstract: A metal-insulator-metal (MIM) capacitor includes a semiconductor substrate and a capacitor device. The capacitor device includes a first conductor upright on the semiconductor substrate, a second conductor upright on the semiconductor substrate, and an insulator disposed used for insulating the first conductor from the second conductor. In a method for fabricating the capacitor device, a mask including a test line pattern and a capacitor pattern with a first trench pattern and a second trench pattern is used to form a test line and the first conductor and the second conductor of the capacitor device, thereby decreasing the cost of for fabricating the MIM capacitor.Type: GrantFiled: December 11, 2013Date of Patent: February 4, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yan-Jhih Huang, Chun-Yuan Hsu, Chien-Chung Chen, Yung-Hsieh Lin
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Patent number: 10367019Abstract: A semiconductor device includes a substrate, a device layer, color filters and a passivation layer. The device overlies the substrate, and has a first surface and a second surface opposite to the first surface. The device layer includes a grid structure disposed on the second surface of the device layer, and the grid structure includes cavities. The first surface of the device layer is adjacent to the substrate. The color filters fill in the cavities. The passivation layer is disposed on the second surface of the device layer, and covers the grid structure and the color filters.Type: GrantFiled: January 29, 2015Date of Patent: July 30, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hung-Chang Chang, Chun-Yuan Hsu, Szu-Hung Yang
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Publication number: 20190127036Abstract: A semiconductor device includes a semiconductor substrate, a device layer over the semiconductor substrate, a first color filter in a top surface of the device layer and adjacent to an edge of the device layer, and a second color filter in the top surface of the device layer. The second color filter has substantially the same thickness and the same color as the first color filter.Type: ApplicationFiled: November 30, 2018Publication date: May 2, 2019Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hung-Chang CHANG, Chun-Yuan HSU, Szu-Hung YANG
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Patent number: 9620550Abstract: Backside illuminated image sensor structures are provided. The backside illuminated image sensor structure includes a device substrate having a frontside and a backside and pixels formed at the frontside of the substrate. The backside illuminated image sensor structure further includes a metal element formed in a dielectric layer over the backside of the substrate and a color filter layer formed over the dielectric layer. In addition, the metal element is configured to form a light blocking area in the device substrate and is made of copper.Type: GrantFiled: November 9, 2015Date of Patent: April 11, 2017Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hung-Chang Chang, Chun-Yuan Hsu, Chien-Chung Chen, Yung-Hsieh Lin
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Publication number: 20160225810Abstract: A semiconductor device includes a substrate, a device layer, color filters and a passivation layer. The device overlies the substrate, and has a first surface and a second surface opposite to the first surface. The device layer includes a grid structure disposed on the second surface of the device layer, and the grid structure includes cavities. The first surface of the device layer is adjacent to the substrate. The color filters fill in the cavities. The passivation layer is disposed on the second surface of the device layer, and covers the grid structure and the color filters.Type: ApplicationFiled: January 29, 2015Publication date: August 4, 2016Inventors: Hung-Chang CHANG, Chun-Yuan HSU, Szu-Hung YANG
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Publication number: 20160064433Abstract: Backside illuminated image sensor structures are provided. The backside illuminated image sensor structure includes a device substrate having a frontside and a backside and pixels formed at the frontside of the substrate. The backside illuminated image sensor structure further includes a metal element formed in a dielectric layer over the backside of the substrate and a color filter layer formed over the dielectric layer. In addition, the metal element is configured to form a light blocking area in the device substrate and is made of copper.Type: ApplicationFiled: November 9, 2015Publication date: March 3, 2016Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hung-Chang CHANG, Chun-Yuan HSU, Chien-Chung CHEN, Yung-Hsieh LIN
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Patent number: 9209339Abstract: Embodiments of mechanisms of a backside illuminated image sensor structure are provided. The backside illuminated image sensor structure includes a device substrate having a frontside and a backside and pixels formed at the frontside of the substrate. The backside illuminated image sensor structure further includes a metal element formed in a dielectric layer over the backside of the substrate and a color filter layer formed over the dielectric layer. In addition, the metal element is configured to form a light blocking area in the device substrate and is made of copper.Type: GrantFiled: December 6, 2013Date of Patent: December 8, 2015Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hung-Chang Chang, Chun-Yuan Hsu, Chien-Chung Chen, Yung-Hsieh Lin
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Publication number: 20150162398Abstract: A metal-insulator-metal (MIM) capacitor includes a semiconductor substrate and a capacitor device. The capacitor device includes a first conductor upright on the semiconductor substrate, a second conductor upright on the semiconductor substrate, and an insulator disposed used for insulating the first conductor from the second conductor. In a method for fabricating the capacitor device, a mask including a test line pattern and a capacitor pattern with a first trench pattern and a second trench pattern is used to form a test line and the first conductor and the second conductor of the capacitor device, thereby decreasing the cost of for fabricating the MIM capacitor.Type: ApplicationFiled: December 11, 2013Publication date: June 11, 2015Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yan-Jhih HUANG, Chun-Yuan HSU, Chien-Chung CHEN, Yung-Hsieh LIN
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Publication number: 20150162365Abstract: Embodiments of mechanisms of a backside illuminated image sensor structure are provided. The backside illuminated image sensor structure includes a device substrate having a frontside and a backside and pixels formed at the frontside of the substrate. The backside illuminated image sensor structure further includes a metal element formed in a dielectric layer over the backside of the substrate and a color filter layer formed over the dielectric layer. In addition, the metal element is configured to form a light blocking area in the device substrate and is made of copper.Type: ApplicationFiled: December 6, 2013Publication date: June 11, 2015Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTDInventors: Hung-Chang CHANG, Chun-Yuan HSU, Chien-Chung CHEN, Yung-Hsieh LIN
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Patent number: 8698217Abstract: A device includes a semiconductor substrate having a front side and a backside. An active image sensor pixel array is disposed on the front side of the semiconductor substrate. A metal shield is disposed on the backside of, and overlying, the semiconductor substrate. The metal shield has an edge facing the active image sensor pixel array. The metal shield has a middle width, and a top width greater than the middle width.Type: GrantFiled: March 23, 2012Date of Patent: April 15, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chun-Yuan Hsu, Kun-Ei Chen, Huai-Tei Yang, Chien-Chung Chen
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Metal Shield Structures in Backside Illumination Image Sensor Chips and Methods for Forming the Same
Publication number: 20130249039Abstract: A device includes a semiconductor substrate having a front side and a backside. An active image sensor pixel array is disposed on the front side of the semiconductor substrate. A metal shield is disposed on the backside of, and overlying, the semiconductor substrate. The metal shield has an edge facing the active image sensor pixel array. The metal shield has a middle width, and a top width greater than the middle width.Type: ApplicationFiled: March 23, 2012Publication date: September 26, 2013Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chun-Yuan Hsu, Kun-Ei Chen, Huai-Tei Yang, Chien-Chung Chen -
Publication number: 20120253415Abstract: A sound control body shaping apparatus includes a sound signal control conversion device, an audio device and an electrode transmission device. The sound signal input of the audio device is selected through a signal switch unit of the sound signal control conversion device. The frequency and signal volume of the input signal are converted into electrical energy for operation through a micro-computer frequency and signal detection unit. The operation result is transmitted to a voltage control circuit and a frequency control circuit of a signal control circuit unit so as to control the electrical energy and the frequency outputted to the electrode transmission device. The output electrical quantity and frequency of the electrical energy can be changed along with music and surrounding sound. The present invention has a better use function and provides various uses.Type: ApplicationFiled: June 24, 2011Publication date: October 4, 2012Inventor: Chun-Yuan HSU
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Patent number: 8269712Abstract: A high-reliability gate driving circuit is disclosed for providing a plurality of gate signals to plural gate lines respectively. The gate driving circuit includes a plurality of shift register stages. Each shift register stage includes a pull-up unit, an energy-store unit, a buffer unit, a discharging unit, a first pull-down unit, a second pull-down unit and a control unit. The pull-up unit pulls up a gate signal according to a driving control voltage and a first clock. The buffer unit receives an input signal. The energy-store unit provides the driving control voltage through performing a charging process based on the input signal. The first pull-down unit pulls down the gate signal according to a control signal. The second pull-down unit pulls down the gate signal according to a second clock having a phase opposite to the first clock. The control unit generates the control signal based on the gate signal.Type: GrantFiled: May 13, 2009Date of Patent: September 18, 2012Assignee: Chunghwa Picture Tubes, Ltd.Inventors: Chih-Jen Shih, Chun-Kuo Yu, Chun-Yuan Hsu