Patents by Inventor Chung-Chen YU

Chung-Chen YU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for wet chemical bath process
    Patent number: 10366932
    Abstract: A method for performing a wet chemical process over a semiconductor wafer is provided. The method includes moving the semiconductor wafer into a chemical solution. The method further includes detecting the concentration of at least one substance in the chemical solution at a plurality of preset time points. The method also includes removing the semiconductor wafer from the chemical solution, when the concentration of the substance is maintained at a fixed approximate value.
    Type: Grant
    Filed: June 8, 2017
    Date of Patent: July 30, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chien-Chiang Lin, Chung-Chen Yu, Shih-Chuan Lin, Zhi-Xioung Hu, Chih-Hung Hsueh
  • METHOD AND SYSTEM FOR WET CHEMICAL BATH PROCESS
    Publication number: 20180151456
    Abstract: A method for performing a wet chemical process over a semiconductor wafer is provided. The method includes moving the semiconductor wafer into a chemical solution. The method further includes detecting the concentration of at least one substance in the chemical solution at a plurality of preset time points. The method also includes removing the semiconductor wafer from the chemical solution, when the concentration of the substance is maintained at a fixed approximate value.
    Type: Application
    Filed: June 8, 2017
    Publication date: May 31, 2018
    Inventors: Chien-Chiang LIN, Chung-Chen YU, Shih-Chuan LIN, Zhi-Xioung HU, Chih-Hung HSUEH