Abstract: A security monitoring system with addressable capability is provided. This system allows a plurality of video cameras to be connected to the security guard room via a single cable instead of a plurality of dedicated cables, as in the prior art. The security monitoring system comprises the following: a cable; a central control unit connected at the first end of the cable, capable of issuing a first signal; at least one addressable video camera connected at the second end of the cable connected to the central control unit; and a monitoring device for displaying a second signal. The addressable video camera receives the first signal from the central control unit and compares the first signal with a preset value; if these match, the addressable video camera sends out a second signal via the cable back to the central control unit. This second signal is then displayed on the monitoring device coupled to the monitor.

Abstract: An apparatus for preventing plasma etching wafer clamp is disclosed in a process chamber. The apparatus comprises a pedestal, a bottom electrode, a wafer clamp, a semiconductor wafer, a quartz ring, a top electrode, a cooling plate, a anodize, and a gas hole. The wafer clamp is used to secure the semiconductor wafer. However, the wafer clamp includes a clamp ring, a concave holder, and a depression. The clamp ring is used to support the semiconductor wafer. The concave holder has a semi-elliptical surface, polymer being formed on the backside of the concave holder to prevent plasma etching in the deposition or etching process, into the clamp ring. Then The depression is designed, higher position, adjacent the concave holder.

Abstract: An addressable video camera has an ability to be assigned an address, that allows a security monitoring system utilizing a plurality of such addressable video cameras to be connected to the security guard room via a single cable. The addressable video camera includes the following: a video imaging device for generating a video signal; an amplifier for amplifying the output video signal; a switch connected between the amplifier and the input/output port of the addressable video camera; an address setting unit for presetting an address value to the addressable video camera; a sync signal detector which is capable of generating a demodulation enable signal in response to the received video control signal; a demodulator for demodulating the address signal in the video control signal; and a microprocessor capable of comparing the demodulated address data with the preset address value. If these match, the switch is turned to the conducting state and the video-imaging device is switched to active operation.

Abstract: A pressure sensing apparatus for regulating the transportation of a liquid which includes a container for containing a gas and a liquid. The container has at least four ports: the first port, used for receiving the liquid; the second port, used for exporting the liquid; the third port, used for releasing the gas; and the fourth port, the fourth opening, used for detecting and measuring internal pressure. Furthermore, the container also includes a vent hole used for venting extra gas out of the container.

Abstract: A dispensing monitor used in a SOG machine to planarize a semiconductor substrate which includes: a container, a gas control valve. a gas release valve, a pressure monitor, and a pressure sensing apparatus. A chemical solution contained in the container is controlled and conveyed through the gas control valve to be sprayed onto the substrate. The pressure monitor and the pressure sensing apparatus and the gas release valve are used for monitoring the internal pressure to keep a constant pressure so that the chemical solution is precisely exported.

Abstract: A pipe cleaning device has a handle, a center rod, a center rod sealing plate, and a scraper assembly. The center rod has a central hollow space having one end connected to the handle and the scraper assembly mounted on the other end. The center rod sealing plate is a three-plate structure for sealing off the pipe opening. The center rod sealing plate has a central hole for the insertion of the center rod. The three-plate structure of the center rod sealing plate serves to increase the ease of disassembling and maintenance. The scraper assembly includes an upper scraper and a lower scraper, wherein the lower scraper has additional scraping knives on its blades to facilitate the scraping of blocking material inside the pipe. Moreover, the scrapers do not block off gas flow inside the pipe completely, so the pump can still pump exhaust gases out even when the scraper assembly is in use.

Abstract: A sensor equipped portable alarm device that also has an input port for connecting to an external sensor so that either the internal sensor or the external sensor can be selected using a sensor select switch. Furthermore, the alarm device has a timer for setting a delay time so that errors arising from immediate action on start-up can be avoided. In addition, the device has a magnetic base for mounting on a magnetic surface and dismounting when the device is no longer needed. Moreover, a rechargeable internal battery is used as an internal power source for the whole device, but power drawn from an external power source can also be used as well. Therefore, the device is portable and can be used anywhere.

Abstract: A monitoring device for a chemical reagent supply system includes a position voltage generator, mounted to a pump of the supply system, to monitor the expansion state of a bellows. The actual outflow of the chemical reagent is calculated by the position voltage generator. According to a demand signal from equipment needing the chemical reagent, which is processed to consider the viscosity of the chemical reagent, a theoretic demand outflow is calculated by the monitoring device. When the difference between the actual outflow and the theoretic demand outflow exceeds a permissible tolerance, the monitoring device raises an alarm signal to warn an operator and thereby to assure the accuracy of the chemical reagent supply system.